Poster Session III

Presentations

• MATERIALS PROCESSING IN LOW PRESSURE PLASMAS: ETCHING, DEPOSITION, NEW MATERIALS

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• Plasma Etching of Extremely High Aspect Ratio Features: Twisting Effects

  POSTER

  Authors

  • Mingmei Wang

    • Iowa State University

  • Ankur Agarwal

    • Iowa State University

  • Yang Yang

    • Iowa State University

  • Mark J. Kushner

    • Iowa State University

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• Potential fluctuation induced by discrete particle effect in a nano-scale trench

  POSTER

  Authors

  • Taesang Lee

    • Korea Advanced Institute of Science and Technology

  • Seongsik Kim

    • National Fusion Research Center

  • Choongseock Chang

    • Korea Advanced Institute of Science and Technology

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• Sheath control with plasma wall bias for the collimated ion beam generation

  POSTER

  Authors

  • Seunghoon Park

    • Department of Physics, KAIST

  • TaeSang Lee

    • Department of Physics, KAIST

  • Hoyul Baek

    • Department of Physics, KAIST

  • Choong-Seock Chang

    • Department of Physics, KAIST and Courant Institute, NYU

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• Low-Temperature, Remote Plasma Oxidation of SiC for MOS Device Applications.

  POSTER

  Authors

  • J.M. Williamson

    • Innovative Scientific Solutions, Inc., Dayton, OH

  • B.A. Tolson

    • Innovative Scientific Solutions, Inc., Dayton, OH

  • S.F. Adams

    • Air Force Research Laboratory, Wright-Patterson AFB, OH

  • J.D. Scofield

    • Air Force Research Laboratory, Wright-Patterson AFB, OH

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• Modification of Biased Bulk Nb Surface with Ar/Cl$_{2}$ Microwave Discharge Plasma

  POSTER

  Authors

  • J. Upadhyay

  • M. Raskovic

  • S. Popovic

  • L. Vuskovic

    • Department of Physics, Old Dominion University, Norfolk, VA

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• Titanium Nitride Coatings Prepared by Reactive Sputtering on Steel

  POSTER

  Authors

  • Saoula Nadia

    • CDTA, DMIL, PO. Box 17 Baba hassen, Algiers, Algeria

  • Henda Karim

    • CDTA

  • Kesri Rafika

    • USTHB, LECTCM, PO. Box 32 El Alia, BabEzzouar, Algiers, Algeria

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• Direct liquid droplet injection for PECVD

  POSTER

  Authors

  • D. Ogawa

    • UT Dallas

  • M. Goeckner

    • UT Dallas
    • University of Texas at Dallas

  • A. Sra

    • UT Dallas

  • R. Timmons

    • UT Arlington

  • L. Overzet

    • UT Dallas

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• Modeling the direct injection of liquid droplets into low-pressure environments and plasmas

  POSTER

  Authors

  • I. Saraf

    • UT Dallas

  • M. Goeckner

    • UT Dallas
    • University of Texas at Dallas

  • L. Overzet

    • UT Dallas

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• PLASMA DIAGNOSTICS: OPTICAL, ELECTRICAL, OTHER

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• Ion Energy Measurements in Continuous Electron Beam-Generated Plasmas

  POSTER

  Authors

  • Scott Walton

    • Naval Research Laboratory
    • Plasma Physics Division, Naval Research Laboratory, Washington, DC 20375
    • Plasma Physics Division, Naval research Laboratory, Washington, DC 20375

  • Evgeniya Lock

    • Naval Research Laboratory
    • Plasma Physics Division, Naval Research Laboratory, Washington, DC 20375

  • Richard Fernsler

    • Plasma Physics Division, Naval Research Laboratory, Washington, DC 20375
    • Plasma Physics Division, Naval Research Laboratory, WAshington, DC 20375

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• XUV Spectroscopic Diagnostics for Microplasma Research

  POSTER

  Authors

  • Dan Stutman

    • Johns Hopkins University

  • Michael Finkenthal

    • Johns Hopkins University

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• Electrical diagnostic of a magnetized RF discharge in CH$_{4}$ created by a multihole cathode used for a-C:H deposition films.

  POSTER

  Authors

  • Djerourou Samira

    • Centre de D\'eveloppement des Techniques Avanc\'ees

  • Ourchabane Mohemed

    • Centre de D\'eveloppement des Techniques Avanc\'ees

  • Henda Karim

    • Centre de D\'eveloppement des Techniques Avanc\'ees

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• Density and lifetime evaluation of weakly ionized plasma for laser-triggered lightning by means of laser absorption

  POSTER

  Authors

  • Michiteru Yamaura

    • Institute for Laser Technology

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• Measuring the Ion Flux to Deposition Substrate in Hollow Cathode Plasma Jet

  POSTER

  Authors

  • Petr Virostko

    • Institute of Physics of the Academy of Sciences of the Czech Republic, v. v. i.

  • Zdenek Hubicka

    • Institute of Physics of the Academy of Sciences of the Czech Republic, v. v. i.

  • Petr Jelinek

    • Institute of Physics of the Academy of Sciences of the Czech Republic, v. v. i.

  • Martin Cada

    • Institute of Physics of the Academy of Sciences of the Czech Republic, v. v. i.

  • Petr Adamek

    • Institute of Physics of the Academy of Sciences of the Czech Republic, v. v. i.

  • Milan Tichy

    • Charles University in Prague

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• Electron-Beam Generated Air Plasma: Electrical and Optical Diagnostic Details

  POSTER

  Authors

  • Robert Vidmar

    • University of Nevada, Reno

  • Kenneth Stalder

    • Stalder Technologies and Research

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• The role of Oxygen triplets in plasma diagnostic

  POSTER

  Authors

  • Vladimir Milosavljevic

    • NCPST, DCU, Ireland

  • Albert Ellingboe

    • NCPST, DCU, Ireland

  • Stephen Daniels

    • NCPST, DCU, Ireland

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• Comparison of helium two-step plasma emission with that predicted from measured cross sections

  POSTER

  Authors

  • C.A. DeJoseph, Jr.

    • Air Force Research Laboratory, WPAFB, OH

  • V.I. Demidov

  • J.C. Blessington

    • West Virginia University

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• Probe measurements in electronegative plasmas: modeling the perturbative effects of the probe

  POSTER

  Authors

  • E.A. Bogdanov

  • A.A. Kudryavtsev

  • K. Yu. Serditov

    • St. Petersburg State University, St. Petersburg, Russia

  • C.A. DeJoseph, Jr.

    • AFRL, Wright-Patterson AFB, OH

  • V.I. Demidov

    • UES, Dayton, OH

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• Electrostatic probe measurement and estimation of the electronegativity for low-pressure inductively coupled SF$_{6}$ and O$_{2}$ plasmas

  POSTER

  Authors

  • Tae Hun Chung

    • Dong-A University

  • Sun Young Kang

    • Dong-A University

  • Eun Young Kim

    • Dong-A University

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• Behavior of Excited Oxygen Atoms in Rare gas mixture O$_{2}$ Surface Wave Excited Plasma

  POSTER

  Authors

  • Keigo Takeda

    • Nagoya University

  • Seigo Takashima

    • Nagoya Univ.
    • Nagoya University

  • Masaru Hori

    • Nagoya Univ.
    • Nagoya University

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• Radical density measurement in VHF C$_{2}$F$_{6}$/H$_{2}$ plasma used for carbon nanowall growth

  POSTER

  Authors

  • Mineo Hiramatsu

    • Meijo University

  • Satoru Kato

    • Meijo University

  • Hajime Sasaki

    • Nagoya University

  • Wakana Takeuchi

    • Nagoya University

  • Shingo Kondo

    • Nagoya University

  • Koji Yamakawa

    • Katagiri Engineering

  • Masaru Hori

    • Nagoya University

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• Measurements of electron temperature and argon metastable density by measuring optical emission in inductively coupled plasma.

  POSTER

  Authors

  • Young-Kwang Lee

  • Kwang-Tae Hwang

  • Min-Hyong Lee

  • Chin-Wook Chung

    • Hanyang University

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• Langmuir probe perturbation in plasma distribution measurement in an inductively coupled plasma

  POSTER

  Authors

  • SungHo Jang

  • JinSung Kim

  • KyeongHyo Lee

  • Chin-Wook Chung

    • Hanyang University

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• Effect of multiphoton ionization in laser Thomson scattering measurements

  POSTER

  Authors

  • A. Kono

    • Nagoya University

  • K. Fukuyama

    • Nagoya University

  • M. Aramaki

    • Nagoya University

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• Electrical characteristics and comparison of two configurations of plasma needle

  POSTER

  Authors

  • Gordana Malovic

  • Nevena Puac

  • Sasa Lazovic

    • Institute of Physics, Belgrade, Serbia

  • Antonije Djordjevic

    • School of Electrical Engineering, Belgrade, Serbia

  • Zoran Petrovic

    • Institute of Physics, Belgrade, Serbia

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• Measurement of the electron temperature on microwave surface wave plasmas powered by the radial-line slot antenna

  POSTER

  Authors

  • Minkyu Kim

    • Tokyo Electron

  • Lee Chen

    • Tokyo Electron

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• Langmuir probes in flowing plasmas

  POSTER

  Authors

  • Peter Sheerin

    • Dublin City University

  • Miles Turner

    • Dublin City University

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• Surface Analysis by Plasma Assisted Desorption Ionisation Mass Spectrometry (PADI-MS)

  POSTER

  Authors

  • Y.A. Gonzalvo

    • Plasma \& Surface Analysis Division, Hiden Analytical Ltd., UK

  • T.D. Whitmore

    • Plasma \& Surface Analysis Division, Hiden Analytical Ltd., UK

  • P.J. Hatton

    • Plasma \& Surface Analysis Division, Hiden Analytical Ltd., UK

  • M.E. Buckley

    • Plasma \& Surface Analysis Division, Hiden Analytical Ltd., UK

  • D. Seymour

    • Plasma \& Surface Analysis Division, Hiden Analytical Ltd., UK

  • C.L. Greenwood

    • Plasma \& Surface Analysis Division, Hiden Analytical Ltd., UK

  • J.A. Rees

    • Plasma \& Surface Analysis Division, Hiden Analytical Ltd., UK

  • L.V. Ratcliffe

    • School of Pharmacy, University of Nottingham, UK

  • D.A. Barrett

    • School of Pharmacy, University of Nottingham, UK

  • F.J.M. Rutten

    • School of Pharmacy and iEPSAM, Keele University, UK

  • M.R.S. McCoustra

    • School of EPS - Chemistry, Heriot-Watt University, UK

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• IONIZATION OF ATOMS AND MOLECULES

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• Comparison of Ion Chemistries in Octafluoro-2-butene ($2$-C$_{4}$F$_{8})$ and in Octfluorocyclobutane ($c$-C$_{4}$F$_{8})$

  POSTER

  Authors

  • Charles Jiao

    • ISSI, Dayton, OH

  • Charles DeJoseph

    • Air Force Research Laboratory, WPAFB, OH

  • Alan Garscadden

    • Air Force Research Laboratory, WPAFB, OH

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• OTHER ATOMIC AND MOLECULAR COLLISION PHENOMENA

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• Plasma-Screening Effects on the Electron-Impact Ionization of Atoms / Molecules and Ions Embedded in Weak Plasma

  POSTER

  Authors

  • Bhushit Vaishnav

    • VPMP Polytechnic, Gandhinagar, Gujarat

  • K.N. Joshipura

    • Dept. of Physics, Sardar Patel University, Vallabh Vidyanagar
    • Dept.of Physics, S.P. Uni. V.V. Nagar, INDIA - 388 120

  • S. Gangopadhyay

    • Dept. of Physics, Sardar Patel University, Vallabh Vidyanagar

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• Surface catalytic contributions to molecule conversion in plasmas

  ORAL

  Authors

  • Richard Engeln

    • Eindhoven University of Technology, Eindhoven, The Netherlands

  • Rens Zijlmans

    • Eindhoven University of Technology, Eindhoven, The Netherlands

  • Onno Gabriel

    • Eindhoven University of Technology, Eindhoven, The Netherlands

  • G\"oksel Yagci

    • Eindhoven University of Technology, Eindhoven, The Netherlands

  • Daan Schram

    • Eindhoven University of Technology, Eindhoven, The Netherlands

  • Stefan Welzel

    • Institut f\'ur Niedertemperatur Plasmaphysik, Greifswald, Germany

  • J\"urgen R\"opcke

    • Institut f\'ur Niedertemperatur Plasmaphysik, Greifswald, Germany

  • Frank Hempel

    • Institut f\'ur Niedertemperatur Plasmaphysik, Greifswald, Germany

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• OTHER PLASMA TOPICS

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• Spectroscopic investigations into extraordinary phenomena in hydrogen plasmas with certain catalysts

  POSTER

  Authors

  • Sander Nijdam

    • Technische Universiteit Eindhoven

  • Andreas van den Brink

    • Technische Universiteit Eindhoven

  • Niels Driessen

    • Technische Universiteit Eindhoven

  • Peter van Noorden

    • Technische Universiteit Eindhoven

  • Ruud de Regt

    • Technische Universiteit Eindhoven

  • Tim Righart

    • Technische Universiteit Eindhoven

  • Gerrit Sitters

    • Technische Universiteit Eindhoven

  • Eddie van Veldhuizen

    • Technische Universiteit Eindhoven

  • Ruud Wijtvliet

    • Technische Universiteit Eindhoven

  • Gerrit Kroesen

    • Technische Universiteit Eindhoven

  View abstract →

• Deterministic Plasma-aided Nanofabrication research within the International Plasma Nanoscience Network

  POSTER

  Authors

  • Igor Levchenko

    • Plasma Nanoscience, The University of Sydney
    • Plasma Nanoscience Network

  • Kostya (Ken) Ostrikov

    • Plasma Nanoscience, The University of Sydney
    • Plasma Nanoscience Network

  • Shuyan Xu

    • Plasma Nanoscience Network
    • NIE and Institute of Advanced Studies, Nanyang Technological University

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• PLASMA PROPULSION AND AERODYNAMICS

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• Structure of stationary shock waves in weakly ionized gas

  POSTER

  Authors

  • D.J. Drake

  • B. Rodgers

  • S. Popovic

  • L. Vuskovic

    • Department of Physics, Old Dominion University

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• Schlieren observation of vortex flow structures in asymmetric dielectric barrier discharges

  POSTER

  Authors

  • Dmitry Opaits

    • Princeton University

  • Alexandre Likhanskii

    • Princeton University

  • Gabriele Neretti

    • Princeton University

  • Sohail Zaidi

    • Princeton University

  • Mikhail Shneider

    • Princeton University

  • Sergey Macheret

    • Skunk Works, Lockheed Martin
    • Skunk Works Lockheed Martin

  • Richard Miles

    • Princeton University

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• LASER MEDIA, KINETICS, PROCESSES

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• X-ray laser spectroscopy of heavy ions at the GSI, Darmstadt, Germany

  POSTER

  Authors

  • Alexander Mayr

    • J.W. Goethe-University, Frankfurt

  • Rustam Berezov

    • J.W. Goethe-University, Frankfurt

  • J. Jacoby

    • University of Frankfurt, Institute for Applied Physics
    • J.W. Goethe-University, Frankfurt

  • Thomas Kuehl

    • GSI, Darmstadt

  • Olga Rosmej

    • GSI, Darmstadt

  • Bernd Sicherl

    • J.W. Goethe-University, Frankfurt

  • Daniel Urescu

    • GSI, Darmstadt

  • Bernhard Zielbauer

    • MBI, Berlin

  • Daniel Zimmer

    • J. Gutenberg-University, Mainz

  View abstract →

• KrF Laser Amplification in the Multi-Staged Electra Facility

  POSTER

  Authors

  • J. Giuliani

    • Naval Research Laboratory

  • M. Wolford

    • Naval Research Laboratory

  • M. Myers

    • Naval Research Laboratory

  • J. Sethian

    • Naval Research Laboratory

  • F. Hegeler

    • CTI

  • P. Burns

    • RSI

  • R. Jaynes

    • SAIC

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• INDUCTIVELY COUPLED PLASMAS

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• Measurement of radial density of Ar metastables in an inductively coupled plasma in Ar/O$_2$

  POSTER

  Authors

  • Yuichiro Hayashi

    • Keio University

  • Satoshi Hirao

    • Keio University

  • Toshiaki Makabe

    • Keio University
    • Keio Univ.

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• Space- and Time-Resolved E-H Transition by using ICCD Camera in an Inductively Coupled Plasma in Ar

  POSTER

  Authors

  • Satoshi Hirao

    • Keio University

  • Yuichiro Hayashi

    • Keio University

  • Toshiaki Makabe

    • Keio University
    • Keio Univ.

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• Kinetics of charged particles and nonlocal control of plasma properties in a pulsed rf icp in argon-oxygen mixtures

  POSTER

  Authors

  • V.I. Demidov

  • J.C. Blessington

  • M.E. Koepke

    • WVU, Morgantown, WV

  • C.A. DeJoseph, Jr.

    • Air Force Research Laboratory, WPAFB, OH

  View abstract →

• Fluid model for a Cl$_{2}$/Ar inductively coupled discharge

  POSTER

  Authors

  • Emilie Despiau-Pujo

    • LPTP, Ecole Polytechnique, France

  • Pascal Chabert

    • LPTP - CNRS
    • LPTP, Ecole polytechnique, France

  • David B. Graves

    • University of California
    • Dept of Chemical Engineering, University of California, Berkeley, USA

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• The effect of a planar antenna on a ferromagnetic core ICP

  POSTER

  Authors

  • Jin Young Bang

  • Sung Won Cho

  • Chin Wook Chung

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• Development of a novel Inductive coupled plasma source

  POSTER

  Authors

  • Hyong-ho Nam

  • Hyo-chang Lee

  • Chin-wook Chung

  View abstract →

• Investigation of an RF ICP

  POSTER

  Authors

  • J. Wiechula

    • University of Frankfurt, Institute for Applied Physics

  • M. Iberler

    • University of Frankfurt, Institute for Applied Physics

  • J. Jacoby

    • University of Frankfurt, Institute for Applied Physics
    • J.W. Goethe-University, Frankfurt

  • Ch. Teske

    • University of Frankfurt, Institute for Applied Physics

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• BIOLOGICAL AND EMERGING APPLICATIONS OF PLASMAS

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• Chemical modification and its evaluation of CNT-based bio-nanosensor by plasma activation technique

  POSTER

  Authors

  • T. Hirata

  • S. Amiya

  • M. Akiya

    • Dept. of Biomed. Eng., Musashi Inst. of Technol.

  • O. Takei

    • Saitama Small Enterprise Prom. Corp.

  • T. Sakai

    • Saitama Univ.

  • T. Nakamura

  • J. Totake

  • T. Yamamoto

    • Univ.of Tokyo

  • R. Hatakeyama

    • Tohoku Univ.

  View abstract →

• ENVIRONMENTAL APPLICATIONS

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• Evaluation of Decomposition Treatment for Halogenized Compounds by Acceleration of Electrons from Carbon Nanotubes

  POSTER

  Authors

  • Michiteru Yamaura

    • Institute for Laser Technology

  • Shigeaki Uchida

    • Tokyo Institute of Technology

  • Masayuki Fujita

    • Institute for Laser Technology

  • Masahiro Nakatsuka

    • Institute for Laser Technology

  • Chiyoe Yamanaka

    • Institute for Laser Technology

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• Development of simultaneous decomposition technique of diesel particulate materials and nitric oxides using dielectric barrier discharge

  POSTER

  Authors

  • Yukihiko Yamagata

    • Kyushu Univ.

  • Yozo Kawagashira

    • Kyushu Univ.

  • Katsunori Muraoka

    • Chubu Univ.

  View abstract →