Poster Session III
POSTER · SRP1 ·
Presentations
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MATERIALS PROCESSING IN LOW PRESSURE PLASMAS: ETCHING, DEPOSITION, NEW MATERIALS
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Plasma Etching of Extremely High Aspect Ratio Features: Twisting Effects
POSTER
Authors
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Mingmei Wang
- Iowa State University
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Ankur Agarwal
- Iowa State University
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Yang Yang
- Iowa State University
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Mark J. Kushner
- Iowa State University
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Potential fluctuation induced by discrete particle effect in a nano-scale trench
POSTER
Authors
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Taesang Lee
- Korea Advanced Institute of Science and Technology
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Seongsik Kim
- National Fusion Research Center
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Choongseock Chang
- Korea Advanced Institute of Science and Technology
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Sheath control with plasma wall bias for the collimated ion beam generation
POSTER
Authors
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Seunghoon Park
- Department of Physics, KAIST
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TaeSang Lee
- Department of Physics, KAIST
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Hoyul Baek
- Department of Physics, KAIST
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Choong-Seock Chang
- Department of Physics, KAIST and Courant Institute, NYU
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Low-Temperature, Remote Plasma Oxidation of SiC for MOS Device Applications.
POSTER
Authors
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J.M. Williamson
- Innovative Scientific Solutions, Inc., Dayton, OH
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B.A. Tolson
- Innovative Scientific Solutions, Inc., Dayton, OH
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S.F. Adams
- Air Force Research Laboratory, Wright-Patterson AFB, OH
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J.D. Scofield
- Air Force Research Laboratory, Wright-Patterson AFB, OH
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Modification of Biased Bulk Nb Surface with Ar/Cl$_{2}$ Microwave Discharge Plasma
POSTER
Authors
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J. Upadhyay
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M. Raskovic
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S. Popovic
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L. Vuskovic
- Department of Physics, Old Dominion University, Norfolk, VA
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Titanium Nitride Coatings Prepared by Reactive Sputtering on Steel
POSTER
Authors
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Saoula Nadia
- CDTA, DMIL, PO. Box 17 Baba hassen, Algiers, Algeria
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Henda Karim
- CDTA
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Kesri Rafika
- USTHB, LECTCM, PO. Box 32 El Alia, BabEzzouar, Algiers, Algeria
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Direct liquid droplet injection for PECVD
POSTER
Authors
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D. Ogawa
- UT Dallas
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M. Goeckner
- UT Dallas
- University of Texas at Dallas
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A. Sra
- UT Dallas
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R. Timmons
- UT Arlington
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L. Overzet
- UT Dallas
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Modeling the direct injection of liquid droplets into low-pressure environments and plasmas
POSTER
Authors
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I. Saraf
- UT Dallas
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M. Goeckner
- UT Dallas
- University of Texas at Dallas
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L. Overzet
- UT Dallas
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PLASMA DIAGNOSTICS: OPTICAL, ELECTRICAL, OTHER
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Ion Energy Measurements in Continuous Electron Beam-Generated Plasmas
POSTER
Authors
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Scott Walton
- Naval Research Laboratory
- Plasma Physics Division, Naval Research Laboratory, Washington, DC 20375
- Plasma Physics Division, Naval research Laboratory, Washington, DC 20375
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Evgeniya Lock
- Naval Research Laboratory
- Plasma Physics Division, Naval Research Laboratory, Washington, DC 20375
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Richard Fernsler
- Plasma Physics Division, Naval Research Laboratory, Washington, DC 20375
- Plasma Physics Division, Naval Research Laboratory, WAshington, DC 20375
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XUV Spectroscopic Diagnostics for Microplasma Research
POSTER
Authors
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Dan Stutman
- Johns Hopkins University
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Michael Finkenthal
- Johns Hopkins University
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Electrical diagnostic of a magnetized RF discharge in CH$_{4}$ created by a multihole cathode used for a-C:H deposition films.
POSTER
Authors
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Djerourou Samira
- Centre de D\'eveloppement des Techniques Avanc\'ees
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Ourchabane Mohemed
- Centre de D\'eveloppement des Techniques Avanc\'ees
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Henda Karim
- Centre de D\'eveloppement des Techniques Avanc\'ees
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Density and lifetime evaluation of weakly ionized plasma for laser-triggered lightning by means of laser absorption
POSTER
Authors
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Michiteru Yamaura
- Institute for Laser Technology
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Measuring the Ion Flux to Deposition Substrate in Hollow Cathode Plasma Jet
POSTER
Authors
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Petr Virostko
- Institute of Physics of the Academy of Sciences of the Czech Republic, v. v. i.
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Zdenek Hubicka
- Institute of Physics of the Academy of Sciences of the Czech Republic, v. v. i.
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Petr Jelinek
- Institute of Physics of the Academy of Sciences of the Czech Republic, v. v. i.
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Martin Cada
- Institute of Physics of the Academy of Sciences of the Czech Republic, v. v. i.
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Petr Adamek
- Institute of Physics of the Academy of Sciences of the Czech Republic, v. v. i.
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Milan Tichy
- Charles University in Prague
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Electron-Beam Generated Air Plasma: Electrical and Optical Diagnostic Details
POSTER
Authors
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Robert Vidmar
- University of Nevada, Reno
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Kenneth Stalder
- Stalder Technologies and Research
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The role of Oxygen triplets in plasma diagnostic
POSTER
Authors
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Vladimir Milosavljevic
- NCPST, DCU, Ireland
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Albert Ellingboe
- NCPST, DCU, Ireland
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Stephen Daniels
- NCPST, DCU, Ireland
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Comparison of helium two-step plasma emission with that predicted from measured cross sections
POSTER
Authors
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C.A. DeJoseph, Jr.
- Air Force Research Laboratory, WPAFB, OH
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V.I. Demidov
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J.C. Blessington
- West Virginia University
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Probe measurements in electronegative plasmas: modeling the perturbative effects of the probe
POSTER
Authors
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E.A. Bogdanov
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A.A. Kudryavtsev
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K. Yu. Serditov
- St. Petersburg State University, St. Petersburg, Russia
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C.A. DeJoseph, Jr.
- AFRL, Wright-Patterson AFB, OH
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V.I. Demidov
- UES, Dayton, OH
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Electrostatic probe measurement and estimation of the electronegativity for low-pressure inductively coupled SF$_{6}$ and O$_{2}$ plasmas
POSTER
Authors
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Tae Hun Chung
- Dong-A University
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Sun Young Kang
- Dong-A University
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Eun Young Kim
- Dong-A University
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Behavior of Excited Oxygen Atoms in Rare gas mixture O$_{2}$ Surface Wave Excited Plasma
POSTER
Authors
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Keigo Takeda
- Nagoya University
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Seigo Takashima
- Nagoya Univ.
- Nagoya University
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Masaru Hori
- Nagoya Univ.
- Nagoya University
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Radical density measurement in VHF C$_{2}$F$_{6}$/H$_{2}$ plasma used for carbon nanowall growth
POSTER
Authors
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Mineo Hiramatsu
- Meijo University
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Satoru Kato
- Meijo University
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Hajime Sasaki
- Nagoya University
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Wakana Takeuchi
- Nagoya University
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Shingo Kondo
- Nagoya University
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Koji Yamakawa
- Katagiri Engineering
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Masaru Hori
- Nagoya University
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Measurements of electron temperature and argon metastable density by measuring optical emission in inductively coupled plasma.
POSTER
Authors
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Young-Kwang Lee
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Kwang-Tae Hwang
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Min-Hyong Lee
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Chin-Wook Chung
- Hanyang University
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Langmuir probe perturbation in plasma distribution measurement in an inductively coupled plasma
POSTER
Authors
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SungHo Jang
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JinSung Kim
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KyeongHyo Lee
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Chin-Wook Chung
- Hanyang University
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Effect of multiphoton ionization in laser Thomson scattering measurements
POSTER
Authors
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A. Kono
- Nagoya University
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K. Fukuyama
- Nagoya University
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M. Aramaki
- Nagoya University
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Electrical characteristics and comparison of two configurations of plasma needle
POSTER
Authors
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Gordana Malovic
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Nevena Puac
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Sasa Lazovic
- Institute of Physics, Belgrade, Serbia
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Antonije Djordjevic
- School of Electrical Engineering, Belgrade, Serbia
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Zoran Petrovic
- Institute of Physics, Belgrade, Serbia
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Measurement of the electron temperature on microwave surface wave plasmas powered by the radial-line slot antenna
POSTER
Authors
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Minkyu Kim
- Tokyo Electron
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Lee Chen
- Tokyo Electron
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Langmuir probes in flowing plasmas
POSTER
Authors
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Peter Sheerin
- Dublin City University
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Miles Turner
- Dublin City University
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Surface Analysis by Plasma Assisted Desorption Ionisation Mass Spectrometry (PADI-MS)
POSTER
Authors
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Y.A. Gonzalvo
- Plasma \& Surface Analysis Division, Hiden Analytical Ltd., UK
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T.D. Whitmore
- Plasma \& Surface Analysis Division, Hiden Analytical Ltd., UK
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P.J. Hatton
- Plasma \& Surface Analysis Division, Hiden Analytical Ltd., UK
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M.E. Buckley
- Plasma \& Surface Analysis Division, Hiden Analytical Ltd., UK
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D. Seymour
- Plasma \& Surface Analysis Division, Hiden Analytical Ltd., UK
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C.L. Greenwood
- Plasma \& Surface Analysis Division, Hiden Analytical Ltd., UK
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J.A. Rees
- Plasma \& Surface Analysis Division, Hiden Analytical Ltd., UK
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L.V. Ratcliffe
- School of Pharmacy, University of Nottingham, UK
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D.A. Barrett
- School of Pharmacy, University of Nottingham, UK
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F.J.M. Rutten
- School of Pharmacy and iEPSAM, Keele University, UK
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M.R.S. McCoustra
- School of EPS - Chemistry, Heriot-Watt University, UK
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IONIZATION OF ATOMS AND MOLECULES
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Comparison of Ion Chemistries in Octafluoro-2-butene ($2$-C$_{4}$F$_{8})$ and in Octfluorocyclobutane ($c$-C$_{4}$F$_{8})$
POSTER
Authors
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Charles Jiao
- ISSI, Dayton, OH
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Charles DeJoseph
- Air Force Research Laboratory, WPAFB, OH
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Alan Garscadden
- Air Force Research Laboratory, WPAFB, OH
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OTHER ATOMIC AND MOLECULAR COLLISION PHENOMENA
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Plasma-Screening Effects on the Electron-Impact Ionization of Atoms / Molecules and Ions Embedded in Weak Plasma
POSTER
Authors
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Bhushit Vaishnav
- VPMP Polytechnic, Gandhinagar, Gujarat
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K.N. Joshipura
- Dept. of Physics, Sardar Patel University, Vallabh Vidyanagar
- Dept.of Physics, S.P. Uni. V.V. Nagar, INDIA - 388 120
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S. Gangopadhyay
- Dept. of Physics, Sardar Patel University, Vallabh Vidyanagar
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Surface catalytic contributions to molecule conversion in plasmas
ORAL
Authors
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Richard Engeln
- Eindhoven University of Technology, Eindhoven, The Netherlands
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Rens Zijlmans
- Eindhoven University of Technology, Eindhoven, The Netherlands
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Onno Gabriel
- Eindhoven University of Technology, Eindhoven, The Netherlands
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G\"oksel Yagci
- Eindhoven University of Technology, Eindhoven, The Netherlands
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Daan Schram
- Eindhoven University of Technology, Eindhoven, The Netherlands
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Stefan Welzel
- Institut f\'ur Niedertemperatur Plasmaphysik, Greifswald, Germany
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J\"urgen R\"opcke
- Institut f\'ur Niedertemperatur Plasmaphysik, Greifswald, Germany
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Frank Hempel
- Institut f\'ur Niedertemperatur Plasmaphysik, Greifswald, Germany
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OTHER PLASMA TOPICS
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Spectroscopic investigations into extraordinary phenomena in hydrogen plasmas with certain catalysts
POSTER
Authors
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Sander Nijdam
- Technische Universiteit Eindhoven
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Andreas van den Brink
- Technische Universiteit Eindhoven
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Niels Driessen
- Technische Universiteit Eindhoven
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Peter van Noorden
- Technische Universiteit Eindhoven
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Ruud de Regt
- Technische Universiteit Eindhoven
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Tim Righart
- Technische Universiteit Eindhoven
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Gerrit Sitters
- Technische Universiteit Eindhoven
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Eddie van Veldhuizen
- Technische Universiteit Eindhoven
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Ruud Wijtvliet
- Technische Universiteit Eindhoven
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Gerrit Kroesen
- Technische Universiteit Eindhoven
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Deterministic Plasma-aided Nanofabrication research within the International Plasma Nanoscience Network
POSTER
Authors
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Igor Levchenko
- Plasma Nanoscience, The University of Sydney
- Plasma Nanoscience Network
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Kostya (Ken) Ostrikov
- Plasma Nanoscience, The University of Sydney
- Plasma Nanoscience Network
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Shuyan Xu
- Plasma Nanoscience Network
- NIE and Institute of Advanced Studies, Nanyang Technological University
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PLASMA PROPULSION AND AERODYNAMICS
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Structure of stationary shock waves in weakly ionized gas
POSTER
Authors
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D.J. Drake
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B. Rodgers
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S. Popovic
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L. Vuskovic
- Department of Physics, Old Dominion University
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Schlieren observation of vortex flow structures in asymmetric dielectric barrier discharges
POSTER
Authors
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Dmitry Opaits
- Princeton University
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Alexandre Likhanskii
- Princeton University
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Gabriele Neretti
- Princeton University
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Sohail Zaidi
- Princeton University
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Mikhail Shneider
- Princeton University
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Sergey Macheret
- Skunk Works, Lockheed Martin
- Skunk Works Lockheed Martin
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Richard Miles
- Princeton University
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LASER MEDIA, KINETICS, PROCESSES
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X-ray laser spectroscopy of heavy ions at the GSI, Darmstadt, Germany
POSTER
Authors
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Alexander Mayr
- J.W. Goethe-University, Frankfurt
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Rustam Berezov
- J.W. Goethe-University, Frankfurt
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J. Jacoby
- University of Frankfurt, Institute for Applied Physics
- J.W. Goethe-University, Frankfurt
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Thomas Kuehl
- GSI, Darmstadt
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Olga Rosmej
- GSI, Darmstadt
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Bernd Sicherl
- J.W. Goethe-University, Frankfurt
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Daniel Urescu
- GSI, Darmstadt
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Bernhard Zielbauer
- MBI, Berlin
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Daniel Zimmer
- J. Gutenberg-University, Mainz
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KrF Laser Amplification in the Multi-Staged Electra Facility
POSTER
Authors
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J. Giuliani
- Naval Research Laboratory
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M. Wolford
- Naval Research Laboratory
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M. Myers
- Naval Research Laboratory
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J. Sethian
- Naval Research Laboratory
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F. Hegeler
- CTI
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P. Burns
- RSI
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R. Jaynes
- SAIC
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INDUCTIVELY COUPLED PLASMAS
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Measurement of radial density of Ar metastables in an inductively coupled plasma in Ar/O$_2$
POSTER
Authors
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Yuichiro Hayashi
- Keio University
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Satoshi Hirao
- Keio University
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Toshiaki Makabe
- Keio University
- Keio Univ.
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Space- and Time-Resolved E-H Transition by using ICCD Camera in an Inductively Coupled Plasma in Ar
POSTER
Authors
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Satoshi Hirao
- Keio University
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Yuichiro Hayashi
- Keio University
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Toshiaki Makabe
- Keio University
- Keio Univ.
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Kinetics of charged particles and nonlocal control of plasma properties in a pulsed rf icp in argon-oxygen mixtures
POSTER
Authors
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V.I. Demidov
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J.C. Blessington
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M.E. Koepke
- WVU, Morgantown, WV
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C.A. DeJoseph, Jr.
- Air Force Research Laboratory, WPAFB, OH
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Fluid model for a Cl$_{2}$/Ar inductively coupled discharge
POSTER
Authors
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Emilie Despiau-Pujo
- LPTP, Ecole Polytechnique, France
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Pascal Chabert
- LPTP - CNRS
- LPTP, Ecole polytechnique, France
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David B. Graves
- University of California
- Dept of Chemical Engineering, University of California, Berkeley, USA
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The effect of a planar antenna on a ferromagnetic core ICP
POSTER
Authors
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Jin Young Bang
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Sung Won Cho
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Chin Wook Chung
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Development of a novel Inductive coupled plasma source
POSTER
Authors
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Hyong-ho Nam
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Hyo-chang Lee
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Chin-wook Chung
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Investigation of an RF ICP
POSTER
Authors
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J. Wiechula
- University of Frankfurt, Institute for Applied Physics
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M. Iberler
- University of Frankfurt, Institute for Applied Physics
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J. Jacoby
- University of Frankfurt, Institute for Applied Physics
- J.W. Goethe-University, Frankfurt
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Ch. Teske
- University of Frankfurt, Institute for Applied Physics
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BIOLOGICAL AND EMERGING APPLICATIONS OF PLASMAS
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Chemical modification and its evaluation of CNT-based bio-nanosensor by plasma activation technique
POSTER
Authors
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T. Hirata
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S. Amiya
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M. Akiya
- Dept. of Biomed. Eng., Musashi Inst. of Technol.
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O. Takei
- Saitama Small Enterprise Prom. Corp.
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T. Sakai
- Saitama Univ.
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T. Nakamura
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J. Totake
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T. Yamamoto
- Univ.of Tokyo
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R. Hatakeyama
- Tohoku Univ.
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ENVIRONMENTAL APPLICATIONS
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Evaluation of Decomposition Treatment for Halogenized Compounds by Acceleration of Electrons from Carbon Nanotubes
POSTER
Authors
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Michiteru Yamaura
- Institute for Laser Technology
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Shigeaki Uchida
- Tokyo Institute of Technology
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Masayuki Fujita
- Institute for Laser Technology
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Masahiro Nakatsuka
- Institute for Laser Technology
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Chiyoe Yamanaka
- Institute for Laser Technology
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Development of simultaneous decomposition technique of diesel particulate materials and nitric oxides using dielectric barrier discharge
POSTER
Authors
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Yukihiko Yamagata
- Kyushu Univ.
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Yozo Kawagashira
- Kyushu Univ.
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Katsunori Muraoka
- Chubu Univ.
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