Plasma Sources

Presentations

• Two-dimensional Collisionless Weakly-ionized Plasma in Fluid Approximation

  ORAL

  Oct. 4, 2007, 10:00 AM – Oct. 4, 2007, 10:15 AM

  Authors

  • Valery Godyak

    • Osram Sylvania

  • Natalia Sternberg

    • Clark University

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• Capacitive Discharges Driven by Combined DC/RF Sources

  ORAL

  Oct. 4, 2007, 10:15 AM – Oct. 4, 2007, 10:30 AM

  Authors

  • Michael Lieberman

    • UC Berkeley

  • Emi Kawamura

    • UC Berkeley

  • A.J. Lichtenberg

    • UC Berkeley

  • E.A. Hudson

    • Lam Research Corporation

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• RF discharge under the influence of a magnetic field

  ORAL

  Oct. 4, 2007, 10:30 AM – Oct. 4, 2007, 10:45 AM

  Authors

  • Ed Barnat

    • Sandia National Laboratories

  • Paul Miller

    • Sandia National Laboratories

  • Alex Paterson

    • Applied Materials

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• The effect of radio-frequency bias on electron density in an inductively coupled plasma reactor, measured by a wave cutoff probe

  ORAL

  Oct. 4, 2007, 10:45 AM – Oct. 4, 2007, 11:00 AM

  Authors

  • Mark Sobolewski

    • National Institute of Standards and Technology

  • Jung-Hyung Kim

    • Korea Research Institute of Standards and Science

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• Seasoning of Plasma Reactors: Feedback Control Strategies to Counter Wafer-to-Wafer Drifts

  ORAL

  Oct. 4, 2007, 11:00 AM – Oct. 4, 2007, 11:15 AM

  Authors

  • Ankur Agarwal

    • University of Illinois

  • Mark J. Kushner

    • Iowa State University

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• Diagnostics of continuous electron beam-generated plasma for material processing

  ORAL

  Oct. 4, 2007, 11:15 AM – Oct. 4, 2007, 11:30 AM

  Authors

  • Evgeniya Lock

    • Naval Research Laboratory
    • Plasma Physics Division, Naval Research Laboratory, Washington, DC 20375

  • Scott Walton

    • Naval Research Laboratory
    • Plasma Physics Division, Naval Research Laboratory, Washington, DC 20375
    • Plasma Physics Division, Naval research Laboratory, Washington, DC 20375

  • Richard Fernsler

    • Plasma Physics Division, Naval Research Laboratory, Washington, DC 20375
    • Plasma Physics Division, Naval Research Laboratory, WAshington, DC 20375

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• Student Excellence Award Finalist: Double layers at anode spots in low-pressure plasma

  ORAL

  Oct. 4, 2007, 11:30 AM – Oct. 4, 2007, 11:45 AM

  Authors

  • Scott Baalrud

    • Engineering Physics Department, University of Wisconsin-Madison

  • Noah Hershkowitz

    • University of Wisconsin-Madison
    • Engineering Physics Department, University of Wisconsin-Madison
    • University of Wisconsin - Madison

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• Study of discharge characteristics on transition from metallic to reactive mode in radio frequency magnetron plasma

  ORAL

  Oct. 4, 2007, 11:45 AM – Oct. 4, 2007, 12:00 PM

  Authors

  • Joyanti Chutia

    • Institute of Advanced Study in Science and Technology

  • Hemen Kakati

    • Institute of Advanced Study in Science and Technology

  • Arup Ratan Pal

    • Institute of Advanced Study in Science and Technology

  • Heremba Bailung

    • Institute of Advanced Study in Science and Technology

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