Electronegative Plasmas

Presentations

• Plasma-Based Low Energy Ion Implantation

  COFFEE_KLATCH · Invited

  Oct. 2, 2007, 4:00 PM – Oct. 2, 2007, 4:30 PM

  Authors

  • Ludovic Godet

    • Varian Semiconductor Equipment Associates

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• Theory and particle-in-cell simulation of ion-ion plasmas

  ORAL

  Oct. 2, 2007, 4:30 PM – Oct. 2, 2007, 4:45 PM

  Authors

  • Pascal Chabert

  • Gary Leray

  • Albert Meige

  • Jean-Luc Raimbault

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• Propagating double layers in electronegative plasmas

  ORAL

  Oct. 2, 2007, 4:45 PM – Oct. 2, 2007, 5:00 PM

  Authors

  • Albert Meige

    • LPTP, Ecole Polytechnique

  • Nicolas Plihon

    • LPTP, Ecole Polytechnique

  • Gerjan Hagelaar

    • LPTP, Ecole Polytechnique

  • Jean-Pierre Boeuf

    • LPTP, Ecole Polytechnique

  • Pascal Chabert

    • LPTP, Ecole Polytechnique

  • Rod Boswell

    • LPTP, Ecole Polytechnique

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• Very High Frequency Capacitively Coupled Plasmas of Electronegative Gases

  ORAL

  Oct. 2, 2007, 5:00 PM – Oct. 2, 2007, 5:15 PM

  Authors

  • Shahid Rauf

    • Applied Materials, Inc.

  • Kallol Bera

    • Applied Materials, Inc.

  • Alex Paterson

    • Applied Materials, Inc.

  • Ken Collins

    • Applied Materials, Inc.

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• Fast silicon etching by plasma-sheath-lens focused negative ions

  ORAL

  Oct. 2, 2007, 5:15 PM – Oct. 2, 2007, 5:30 PM

  Authors

  • Eugen Stamate

    • Risoe National Laboratory, Technical University of Denmark

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• Plasma Characterization of Electronegatively diluted VHF CCP Plasmas

  ORAL

  Oct. 2, 2007, 5:30 PM – Oct. 2, 2007, 5:45 PM

  Authors

  • Alex Paterson

    • Applied Materials

  • Ned Hammond

    • Applied Materials

  • Shahid Rauf

    • Applied Materials

  • Ed Barnat

    • Sandia National Laboratories

  • Paul Miller

    • Sandia National Laboratories

  • Greg Hebner

    • Sandia National Laboratories

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• Formation of ion flux in low frequency and low pressure ccrf discharge

  ORAL

  Oct. 2, 2007, 5:45 PM – Oct. 2, 2007, 6:00 PM

  Authors

  • I.V. Schweigert

    • Institute of Theoretical and Applied Mechanics, 630090 Novosibirsk, Russia
    • Institute of Theoretical and Applied Mechanics SBRAS

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