Plasma-Surface Interactions

Presentations

• Student Excellence Award Finalist: Surface recombination study in near real time in Cl$_{2}$ plasmas

  ORAL

  Oct. 2, 2007, 4:00 PM – Oct. 2, 2007, 4:15 PM

  Authors

  • Joydeep Guha

    • University of Houston

  • Vincent M. Donnelly

    • University of Houston

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• Analysis of plasma-surface interactions during plasma etching by in-situ diagnostics of reactants and reaction products

  ORAL

  Oct. 2, 2007, 4:15 PM – Oct. 2, 2007, 4:30 PM

  Authors

  • Yoshinori Ueda

  • Masahiro Yoshida

  • Koji Eriguchi

  • Kouichi Ono

    • Kyoto University

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• Experimental study and modeling of plasma-polymer interactions

  ORAL

  Oct. 2, 2007, 4:30 PM – Oct. 2, 2007, 4:45 PM

  Authors

  • Anatoly Napartovich

    • SRC RF TRINITI

  • Yuri Akishev

    • SRC RF TRINITI

  • Mikhail Grushin

    • SRC RF TRINITI

  • Nikolay Dyatko

    • SRC RF TRINITI

  • Igor Kochetov

    • SRC RF TRINITI

  • Nikolay Trushkin

    • SRC RF TRINITI

  • Tran Duc

    • Biophy Research S.A.

  • Tran Duc

    • Biophy Research S.A.

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• Hydrogen plasma interaction with graphite surface

  ORAL

  Oct. 2, 2007, 4:45 PM – Oct. 2, 2007, 5:00 PM

  Authors

  • Gilles Cartry

    • CNRS-Universite de Provence

  • Cedric Thomas

    • CNRS-Universite de Provence

  • Jean-Marc Layet

    • CNRS-Universite de Provence

  • Thierry Angot

    • CNRS-Universite de Provence

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• Plasma-Surface Interactions With Advanced Polymers For Nanoscale Patterning Of Materials

  COFFEE_KLATCH · Invited

  Oct. 2, 2007, 5:00 PM – Oct. 2, 2007, 5:30 PM

  Authors

  • Gottlieb Oehrlein

    • University of Maryland, College Park, MD 20742-2115

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• Comparison of gas-phase chemistry during deposition of amorphous carbon films using capacitive and inductive discharges.

  ORAL

  Oct. 2, 2007, 5:30 PM – Oct. 2, 2007, 5:45 PM

  Authors

  • S. Ramachandran

    • UT Dallas

  • L. Overzet

    • UT Dallas

  • W. Hu

    • UT Dallas

  • L.S.N. Tao

    • UT Dallas

  • G.-S. Lee

  • C. Nelson

    • UT Dallas

  • M. Goeckner

    • UT Dallas
    • University of Texas at Dallas

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