Capacitively Coupled Discharges

Presentations

• Electron heating in dual-frequency capacitive discharges

  COFFEE_KLATCH · Invited

  Oct. 2, 2007, 10:00 AM – Oct. 2, 2007, 10:30 AM

  Authors

  • Miles Turner

    • Dublin City University

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• Ionisation dynamics and frequency coupling in dual frequency capacitively coupled plasmas

  ORAL

  Oct. 2, 2007, 10:30 AM – Oct. 2, 2007, 10:45 AM

  Authors

  • D. O'Connell

    • Centre for Plasma Science and Technology, Ruhr University Bochum, Germany

  • T. Gans

    • Centre for Plasma Physics, Queen's University Belfast, Northern Ireland

  • E. Semmler

  • P. Awakowicz

    • Centre for Plasma Science and Technology, Ruhr University Bochum, Germany

  • A.R. Ellingboe

  • M.M. Turner

    • National Centre for Plasma Science and Technology, Dublin City University, Ireland

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• Student Excellence Award Finalist: Electron heating in asymmetric capacitively coupled RF discharges at low pressures

  ORAL

  Oct. 2, 2007, 10:45 AM – Oct. 2, 2007, 11:00 AM

  Authors

  • Julian Schulze

    • Ruhr-University Bochum

  • Brian Heil

    • Ruhr-University Bochum

  • Dirk Luggenhoelscher

    • Ruhr-University Bochum

  • Uwe Czarnetzki

    • Ruhr-University Bochum

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• Electron heating and ionization mechanisms in capacitively coupled dual frequency plasmas

  ORAL

  Oct. 2, 2007, 11:00 AM – Oct. 2, 2007, 11:15 AM

  Authors

  • Egmont Semmler

    • Ruhr-University Bochum

  • Deborah O'Connell

    • Ruhr-University Bochum

  • Timo Gans

    • Queens University Belfast

  • Peter Awakowicz

    • Ruhr-University-Bochum
    • Ruhr-University Bochum

  • Achim von Keudell

    • Ruhr-University Bochum

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• Numerical modelling of electron beams accelerated by the RF plasma boundary sheath

  ORAL

  Oct. 2, 2007, 11:15 AM – Oct. 2, 2007, 11:30 AM

  Authors

  • B.G. Heil

  • J. Schulze

  • D. Luggenh\"olscher

  • U. Czarnetzki

    • Institute for Plasma and Atomic Physics, Ruhr-University Bochum

  • T. Mussenbrock

  • R.P. Brinkmann

    • Institute for Theoretical Electrical Engineering, Ruhr-University Bochum

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• Discharge Electrode Impedance Effect on Nonlinear Wave Generation in Dual-Frequency Capacitively Coupled Plasma

  ORAL

  Oct. 2, 2007, 11:30 AM – Oct. 2, 2007, 11:45 AM

  Authors

  • Yohei Yamazawa

    • Tokyo Electron
    • Tokyo Electron AT LTD.

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• Analogy between electron heating mechanisms in symmetric dual and asymmetric single frequency capacitive RF discharges

  ORAL

  Oct. 2, 2007, 11:45 AM – Oct. 2, 2007, 12:00 PM

  Authors

  • Julian Schulze

    • Ruhr-University Bochum

  • Brian Heil

    • Ruhr-University Bochum

  • Dirk Luggenhoelscher

    • Ruhr-University Bochum

  • Uwe Czarnetzki

    • Ruhr-University Bochum

  • Bert Ellingboe

    • Dublin City University

  View abstract →