Capacitively Coupled Plasmas

Presentations

• Negative Ions in Dual-Frequency Capacitively Coupled Fluorocarbon Plasmas

  COFFEE_KLATCH · Invited

  Oct. 13, 2006, 10:00 AM – Oct. 13, 2006, 10:30 AM

  Authors

  • Jean-Paul Booth

    • Ecole Polytechnique

  View abstract →

• New insights into electron heating and ionisation mechanisms in CCP discharges at low pressures

  ORAL

  Oct. 13, 2006, 10:30 AM – Oct. 13, 2006, 10:45 AM

  Authors

  • Deborah O'Connell

  • Timo Gans

  • Uwe Czarnetzki

    • Institute for Plasma and Atomic Physics, CPST, Ruhr-University Bochum, Germany
    • Institute for Plasma and Atomic Physics, Ruhr University Bochum

  • David Vender

    • Port Arthur, Tasmania, Australia

  • Rod Boswell

    • SP3/RSPhysSE, ANU, Canberra, Australia

  View abstract →

• Electron heating mechanisms in dual frequency capacitive discharges

  ORAL

  Oct. 13, 2006, 10:45 AM – Oct. 13, 2006, 11:00 AM

  Authors

  • M.M. Turner

    • Dublin City University
    • Dublin City University, Ireland

  • P. Chabert

    • Ecole Polytechnique, France

  View abstract →

• Electron heating and ionisation mechanisms in dual-frequency capacitively coupled radio-frequency discharges

  ORAL

  Oct. 13, 2006, 11:00 AM – Oct. 13, 2006, 11:15 AM

  Authors

  • Timo Gans

  • Julian Schulze

  • Deborah O'Connell

  • Uwe Czarnetzki

    • Institute for Plasma and Atomic Physics, CPST, Ruhr-University Bochum, Germany
    • Institute for Plasma and Atomic Physics, Ruhr University Bochum

  • Bert Ellingboe

  • Miles Turner

    • NCPST, Dublin City University, Ireland

  View abstract →

• Nonlinear electron resonance heating in dual frequency capacitive discharges

  ORAL

  Oct. 13, 2006, 11:15 AM – Oct. 13, 2006, 11:30 AM

  Authors

  • D. Ziegler

  • T. Mussenbrock

  • R.P. Brinkmann

    • Institute for Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany

  View abstract →

• Global model of a Dual frequency Capacitive Discharge

  ORAL

  Oct. 13, 2006, 11:30 AM – Oct. 13, 2006, 11:45 AM

  Authors

  • Pierre Levif

  • Pascal Chabert

    • LPTP CNRS Ecole Polytechnique

  • M.M. Turner

    • Dublin City University
    • Dublin City University, Ireland

  View abstract →

• Frequency dependent ion kinetics in a 300 mm dual-frequency capacitively coupled plasma reactor

  ORAL

  Oct. 13, 2006, 11:45 AM – Oct. 13, 2006, 12:00 PM

  Authors

  • G.A. Hebner

  • E.V. Barnat

  • P.A. Miller

    • Sandia National Laboratories

  • A.M. Paterson

  • J.P. Holland

    • Applied Materials

  View abstract →