Plasma-Surface Interactions

Presentations

• Plasma-Surface Interactions on a Spinning Wall Probed by Mass Spectrometry and Auger Electron Spectroscopy

  COFFEE_KLATCH · Invited

  Oct. 13, 2006, 8:00 AM – Oct. 13, 2006, 8:30 AM

  Authors

  • Vincent M. Donnelly

    • University of Houston

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• Influence of Ion Flux, Ion Energy, Fluorine Availability, and Surface Temperatures on SiO$_{2}$ Etch Rates in FC Plasmas

  ORAL

  Oct. 13, 2006, 8:30 AM – Oct. 13, 2006, 8:45 AM

  Authors

  • Caleb Nelson

  • Sanket Sant

  • Lawrence Overzet

    • University of Texas at Dallas
    • UT Dallas

  • Matthew Goeckner

    • University of Texas at Dallas

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• In-situ measurement of an accumulation and a reduction of bottom charging on a SiO$_{2}$ contact hole with a high aspect ratio in a pulsed 2f-CCP in Ar and in CF$_{4}$/Ar

  ORAL

  Oct. 13, 2006, 8:45 AM – Oct. 13, 2006, 9:00 AM

  Authors

  • Takeshi Ohmori

    • Keio University

  • Takeshi K. Goto

    • Keio Univ.

  • Takeshi Kitajima

    • NDA
    • National Defense Academy
    • National Defence Academy

  • Toshiaki Makabe

    • Keio Univ.
    • Keio University

  • Seiji Samukawa

    • Tohoku Univ.
    • Tohoku University

  • Ikuo Kurachi

    • MIYAGI-OKI

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• Production of hyperthermal neutrals on surfaces

  ORAL

  Oct. 13, 2006, 9:00 AM – Oct. 13, 2006, 9:15 AM

  Authors

  • Tatiana Babkina

  • Timo Gans

  • Uwe Czarnetzki

    • Institute for Plasma and Atomic Physics, CPST, Ruhr-University Bochum, Germany
    • Institute for Plasma and Atomic Physics, Ruhr University Bochum

  • D.A. Kovacs

    • Institute for Applied Plasma Physics, CPST, Ruhr-University Bochum, Germany

  • Detlef Diesing

    • Institute of Physical and Theoretical Chemistry, University Duisburg-Essen, Germany

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• Molecule formation in plasma at surface

  ORAL

  Oct. 13, 2006, 9:15 AM – Oct. 13, 2006, 9:30 AM

  Authors

  • D.C. Schram

  • J.H. van Helden

  • R.A.B. Zijlmans

  • G. Yagci

    • Technische Universiteit Eindhoven

  • J. Ropcke

  • S. Welzel

    • Institut fur Niedertemperatur Plasmaphysik

  • O. Gabriel

  • R. Engeln

    • Technische Universiteit Eindhoven

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