Plasma Applications for Nanotechnology
FOCUS · PR1 ·
Presentations
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Ultimate Top-down Etching Processes Using Advanced Neutral Beam for Future Nano-scale Devices
COFFEE_KLATCH · Invited
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Authors
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Seiji Samukawa
- Tohoku Univ.
- Tohoku University
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Deposition of vertically oriented single-walled carbon nanotubes in highly collisional atmospheric pressure plasma
ORAL
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Authors
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Kuma Ohnishi
- Dept of Mechanical and Control Engineering, Tokyo Institute of Technology
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Tomohiro Nozaki
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Ken Okazaki
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Joachim Heberlein
- Dept of Mechanical Engineering, The University of Minnesota
- University of Minnesota
- University of Mineesota
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Uwe Kortshagen
- University of Minnesota
- Dept of Mechanical Engineering, Univerisity of Minnesota, 111 Church Street SE, Minneapolis, MN 55414
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Measurement of plasma density and electron energy distribution function in a filamented capacitively coupled silane-argon plasma
ORAL
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Authors
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Ameya Bapat
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Uwe Kortshagen
- University of Minnesota
- Dept of Mechanical Engineering, Univerisity of Minnesota, 111 Church Street SE, Minneapolis, MN 55414
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Application of microplasma to synthesis of silicon nanoparticles
ORAL
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Authors
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Kenji Sasaki
- Dept. of Mechanical and Control Enngineering, Tokyo Institute of Technology
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Tomohisa Ogino
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Daisuke Asahi
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Tomohiro Nozaki
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Ken Okazaki
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Synthesis of highly monodisperse Ge crystals in a capacitively coupled flow through reactor for photovoltaic applications
ORAL
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Authors
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Ryan Gresback
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Uwe Kortshagen
- University of Minnesota
- Dept of Mechanical Engineering, Univerisity of Minnesota, 111 Church Street SE, Minneapolis, MN 55414
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