Diagnostics II: Optical

Presentations

• Gaussian expansion and annular analysis of ultracold Sr plasma

  ORAL

  Oct. 11, 2006, 4:00 PM – Oct. 11, 2006, 4:15 PM

  Authors

  • Sampad Laha

  • Clayton Simien

  • Priya Gupta

  • Thomas Killian

    • Rice University

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• Electric Field Measurement by Fluorescence-Dip Spectroscopy in Krypton

  ORAL

  Oct. 11, 2006, 4:15 PM – Oct. 11, 2006, 4:30 PM

  Authors

  • Tobias Kampschulte

  • Dirk Luggenhoelscher

  • Julian Schulze

  • Uwe Czarnetzki

    • Institute for Plasma and Atomic Physics, CPST, Ruhr-University Bochum, Germany

  • Marc Bowden

    • Dept. of Physics and Astronomy, The Open University, Milton Keynes, UK

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• A Laser-based Measurement System for Atmospheric Pressure Plasmas

  ORAL

  Oct. 11, 2006, 4:30 PM – Oct. 11, 2006, 4:45 PM

  Authors

  • Mark Bowden

    • Open University, UK

  • Ronan Faulkner

  • Mike Hopkins

    • Dublin City University, Ireland

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• Gas temperature and the degree of dissociation for different operating regimes of a nitrogen helicon plasma source

  ORAL

  Oct. 11, 2006, 4:45 PM – Oct. 11, 2006, 5:00 PM

  Authors

  • Costel Biloiu

  • Earl Scime

  • Xuan Sun

  • Ioana A. Biloiu

  • Robert Hardin

  • Zane Harvey

    • West Virginia University, Physics Department, Morgantown, WV 26506-6315

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• Estimation of N atom density in a nitrogen radical source for GaN growth by optical emission spectroscopy--comparison with appearance mass spectrometry

  ORAL

  Oct. 11, 2006, 5:00 PM – Oct. 11, 2006, 5:15 PM

  Authors

  • K. Sasaki

  • J. Osaka

  • H. Kanai

  • T. Ishijima

  • H. Toyoda

  • H. Sugai

    • Nagoya University, Japan

  • N. Sadeghi

    • Universit\'e Joseph Fourier de Grenoble, France

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• Characteristics of in-situ chamber cleaning for DPS+ metal etcher by using optical emission spectroscopy

  ORAL

  Oct. 11, 2006, 5:15 PM – Oct. 11, 2006, 5:30 PM

  Authors

  • Yonghwan Ryu

  • Woojin Cho

  • Yongwoo Lee

  • Minchul Chae

  • Sungun Kwon

  • Jaeseung Hwang

    • Samsung Electronics

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