Allis Prize Lecture

Presentations

• Nanoelectronics and Plasma Processing---The Next 15 Years and Beyond

  COFFEE_KLATCH · Invited

  Oct. 11, 2006, 10:00 AM – Oct. 11, 2006, 11:00 AM

  Authors

  • Michael A. Lieberman

    • University of California, Berkeley

  View abstract →