Diagnostics I: Electrical
ORAL · GW1 ·
Presentations
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Detailed Time-resolved Plasma Diagnostics in a Pulsed DC Magnetron Discharge
ORAL
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Authors
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Ian Swindells
- The University of Liverpool
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Peter Kelly
- Manchester Metropolitan University
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James Bradley
- University of Liverpool
- The University of Liverpool
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Investigation of total energy flux density at a floating substrate in pulsed DC unbalanced magnetron.
ORAL
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Authors
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Martin Cada
- University of Liverpool
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Greg Clarke
- Manchester Metropolitan University
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James Bradley
- University of Liverpool
- The University of Liverpool
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RF Impedance of a Spherical Probe at High and Low Gas Pressure
ORAL
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Authors
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R.F. Fernsler
- US Naval Research Laboratory, Plasma Physics Division
- US Naval Research Laboratory
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D.N. Walker
- SFA, Crofton, MD
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D.D. Blackwell
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W.E. Amatucci
- Plasma Physics Division, Naval Research Laboratory
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S.J. Messer
- NRL-NRC Postdoctoral Associate
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Extended plasma parameter extraction using in-line RF metrology for multi-frequency plasma reactors
ORAL
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Authors
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Steven Shannon
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Daniel Hoffman
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Matthew Miller
- Applied Materials Etch Engineering Technology Group
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Response of an Isolated Dust Particulate in a DC Glow Discharge Subjected to External Excitations
ORAL
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Authors
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J. McFerran
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J. West
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V. Subramaniam
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A. Kahraman
- Ohio State University
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Collisionless nonlinear damping of dust acoustic waves due to dust charge fluctuations
ORAL
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Authors
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Jyotirmoy Pramanik
- Institute for Plasma Research, Bhat, Gandhinagar, India
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