Neutral gas flow effect in a large area CCP plasma source

We modified XPDP2 code to include neutral gas flow effect on CCP discharge for argon gas. Parallelized multi-grid method is used for efficient field calculation. Particle simulation is used for gas flow calculation and spatially non uniform gas distribution is obtained. Ionization, charge exchange and neutral - neutral collision effect are considered for realistic neutral gas simulation. Multi-time scale simulation is used to get steady state discharge including gas depletion by ionization. Preliminary results are obtained and compared with the results from uniform background neutral gas distribution.