Plasma Boundaries: Sheaths and Boundary Layers

Presentations

• Electron Sheaths and Non-ambipolar Diffusion in Laboratory Plasma

  ORAL

  Oct. 10, 2006, 8:00 AM – Oct. 10, 2006, 8:15 AM

  Authors

  • Scott Baalrud

    • Engineering Physics Department, University of Wisconsin-Madison

  • Noah Hershkowitz

    • Dept. of Engineering Physics, University of Wisconsin-Madison
    • University of Wisconsin-Madison
    • University of Wisconsin - Madison
    • Engineering Physics Department, University of Wisconsin-Madison

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• Total Non-Ambipolar RF Electron Source -- Better than a Hollow Cathode

  ORAL

  Oct. 10, 2006, 8:15 AM – Oct. 10, 2006, 8:30 AM

  Authors

  • Noah Hershkowitz

    • Dept. of Engineering Physics, University of Wisconsin-Madison
    • University of Wisconsin-Madison
    • University of Wisconsin - Madison
    • Engineering Physics Department, University of Wisconsin-Madison

  • Ben Longmier

  • Scott Baalrud

    • Engineering Physics Department, University of Wisconsin-Madison

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• Arc cathode spots and normal spots on glow cathodes: self-organization phenomena

  ORAL

  Oct. 10, 2006, 8:30 AM – Oct. 10, 2006, 8:45 AM

  Authors

  • Mikhail Benilov

    • Departamento de Fisica, Universidade da Madeira, Largo do Municipio, 9000 Funchal, Portugal

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• Revisiting the capacitive sheath

  ORAL

  Oct. 10, 2006, 8:45 AM – Oct. 10, 2006, 9:00 AM

  Authors

  • Igor Kaganovich

    • Princeton Plasma Physics Laboratory

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• Influence of a micro-scale wafer structure upon sheath profile in 2f-CCP in SF$_6$/O$_2$

  ORAL

  Oct. 10, 2006, 9:00 AM – Oct. 10, 2006, 9:15 AM

  Authors

  • Fukutaro Hamaoka

  • Takashi Yagisawa

  • Toshiaki Makabe

    • Keio Univ.
    • Keio University

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• Ion Energy Distribution Measured in Pulsed Boron Trifluoride Glow Discharge

  ORAL

  Oct. 10, 2006, 9:15 AM – Oct. 10, 2006, 9:30 AM

  Authors

  • Ludovic Godet

  • Svetlana Radovanov

  • Jay Scheuer

    • Varian Semiconductor Equipment Associates

  • Christophe Cardinaud

  • Gilles Cartry

    • University of Nantes, France

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