Plasma Sources I

Presentations

• Electron beam-generated ion-ion plasmas: Etching and diagnostics

  ORAL

  Oct. 10, 2006, 8:00 AM – Oct. 10, 2006, 8:15 AM

  Authors

  • S.G. Walton

  • D. Leonhardt

  • R.F. Fernsler

    • US Naval Research Laboratory, Plasma Physics Division
    • US Naval Research Laboratory

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• Automated method for creating arbitrary substrate voltage wave forms for manipulating energy distribution of bombarding ions during plasma processing

  ORAL

  Oct. 10, 2006, 8:15 AM – Oct. 10, 2006, 8:30 AM

  Authors

  • Amy Wendt

    • UW Madison

  • Marlann Patterson

    • UW Platteville

  • Hsuan-Yih Chu

    • UW Madison

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• Scaling laws in dc micro discharges

  ORAL

  Oct. 10, 2006, 8:30 AM – Oct. 10, 2006, 8:45 AM

  Authors

  • Marija Radmilovic-Radjenovic

    • Associate Research Professor

  • Zoran Petrovic

    • Research Professor

  • Branislav Radjenovic

    • Associate Research Professor

  • Paule Maguire

    • Research Professor

  • Charles Mahony

    • Research Professor

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• Hydrodynamic models for the positive column with neutral gas depletion.

  ORAL

  Oct. 10, 2006, 8:45 AM – Oct. 10, 2006, 9:00 AM

  Authors

  • Jean-Luc Raimbault

    • LPTP CNRS Ecole Polytechnique

  • Laurent Liard

  • Pascal Chabert

    • LPTP CNRS Ecole Polytechnique

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• Numerical Simulation of the DC Discharge Using CFD-ACE+

  ORAL

  Oct. 10, 2006, 9:00 AM – Oct. 10, 2006, 9:15 AM

  Authors

  • Ning Zhou

    • ESI-CFD, 6767 Old Madison Pike NW, Suite 600, Huntsville, AL 35806

  • Peng Zhang

    • ESI-CFD, 6767 Old Madison Pike NW, Suite 600, Huntsville, AL 35806

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• Simulation of moving striations in rare gas plasmas

  ORAL

  Oct. 10, 2006, 9:15 AM – Oct. 10, 2006, 9:30 AM

  Authors

  • Vladimir Kolobov

    • CFD Research Corporation, Huntsville, AL, USA

  • Robert Arslanbekov

    • CFD Research Corporation, Huntsville, AL, USA

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