Plasma Diagnostics II
ORAL · VH1 ·
Presentations
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Diagnostics of Oxygen Atoms in Surface Wave Plasma with Vacuum Ultraviolet Laser Absorption Spectroscopy
ORAL
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Authors
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Keigo Takeda
- Graduate School of Eng., Nagoya Univ.
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Yoshiki Kubota
- Graduate School of Eng., Nagoya Univ.
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Anna Serdyuchenko
- Institute for Experimental Physics V, Ruhr-Univ. Bochum
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Seigo Takashima
- Dept. of Electrical Engineering and Computer Science, Nagoya Univ.
- Nagoya Univ.
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Masaru Hori
- Dept. of Electrical Engineering and Computer Science, Nagoya Univ.
- Graduate School of Eng., Nagoya Univ.
- Nagoya Univ.
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Detection of N$_{2}$(A$^{3}\Sigma ^{+}_{u})$ metastable in DBD discharge by OODR-LIF spectroscopy
ORAL
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Authors
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Santolo De Benedictis
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Paolo Francesco Ambrico
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Giorgio Dilecce
- Institute of Inorganic Methodologies and Plasmas, CNR, Bari, Italy
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Milan Simek
- Institute of Plasma Physics, Laboratory of Pulse Plasma Systems, Prague, Czech Republic
- Institute of Plasma Physics, Academy of Sciences of the Czech Republic, Za Slovankou 3, 18221 Prague 8, Czech Republic
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Development of ultracompact absolute density measurement system for atomic radicals and simultaneous measurement technique of H, N, O radicals employing the system
ORAL
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Authors
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Seigo Takashima
- Dept. of Electrical Engineering and Computer Science, Nagoya Univ.
- Nagoya Univ.
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Hiroyuki Kano
- NU Eco-Engineering
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Masaru Hori
- Dept. of Electrical Engineering and Computer Science, Nagoya Univ.
- Graduate School of Eng., Nagoya Univ.
- Nagoya Univ.
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Multipurpose temperature gradient probe: operation and applications
ORAL
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Authors
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Pavlo Rutkevych
- PSAC/NIE/NTU, Singapore
- Plasma Sources and Applications Center, NIE, Nanyang Technological University, Singapore
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Kostya Ostrikov
- School of Physics, The University of Sydney, Sydney NSW 2006, Australia
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JiDong Long
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ShuYan Xu
- PSAC/NIE/NTU, Singapore
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Monitoring Ion Energy at a Wafer Surface During Plasma Etching
ORAL
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Authors
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Mark Sobolewski
- NIST
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