Poster Session II
POSTER · SW ·
Presentations
-
CAPACITIVELY COUPLED PLASMAS
COFFEE_KLATCH
-
Study of a capacitive discharge driven by three frequencies using inline RF metrology
POSTER
Authors
-
Steven Shannon
- Applied Materials Incorporated
-
Joel Blackburn
- Advanced Energy Incorporated
-
Daniel Hoffman
-
Valery Godyak
-
Jang Gyoo Yang
- Applied Materials Incorporated
-
Stephen Rosenblum
- Advanced Energy Incorporated
-
-
Diagnostics of a large size cylindrical CCP reactor
POSTER
Authors
-
Nevena Pua\v{c}
- Institute of Physics, POB 68, 11080 Zemun, Belgrade, Serbia and Montenegro
-
Gordana Malovi\'c
- Institute of Physics, POB 68, 11080 Zemun, Belgrade, Serbia and Montenegro
-
Antonije Djordjevi\'c
- School of Electrical Engineering, Bulevar Kralja Aleksandra 73, 11000 Belgrade, Serbia and Montenegro
-
Zoran Petrovi\'c
- Institute of Physics, POB 68, 11080 Zemun, Belgrade, Serbia and Montenegro
- Institute of Physics, POB 68, 11080 Zemun, Belgrade,Serbia and Montenegro
-
-
Secondary electron effects in dual frequency discharges
POSTER
Authors
-
Miles M. Turner
- Dublin City University, Ireland
-
-
Measurements of power dissipation in a capacitive sheath
POSTER
Authors
-
David Gahan
-
Michael B. Hopkins
-
Albert R. Ellingboe
- Dublin City University, Ireland
-
-
Ignition conditions for peripheral plasma in a grounded chamber connected to a dual frequency capacitive discharge
POSTER
Authors
-
Sungjin Kim
-
M.A. Lieberman
- University of California Berkeley
- Department of Electrical Engineering and Computer Science, University of California, Berkeley, USA
- University of California, Berkeley
-
A.J. Lichtenberg
- University of California, Berkeley
-
J.T. Gudmundsson
- University of Iceland, Reykjavik, Iceland
-
-
Stochastic heating in RF capacitive discharges
POSTER
Authors
-
E. Kawamura
-
M.A. Lieberman
- University of California Berkeley
- Department of Electrical Engineering and Computer Science, University of California, Berkeley, USA
- University of California, Berkeley
-
-
Modeling of a 2f-CCP in SF$_6$/O$_2$ for high-speed MEMS processiong
POSTER
Authors
-
Fukutaro Hamaoka
-
Takashi Yagisawa
- Keio University
-
Toshiaki Makabe
- Keio University
-
-
Driving frequency effect on the heating mode transition in capacitive discharge
POSTER
Authors
-
ShinJae You
- KAIST
-
SungSik Kim
- KBSI
-
Hong Young Chang
- KAIST
- Korea Advanced Institute of Science and Technology
-
-
Time resolved investigations of hydrogen DFC-CCP plasma sheaths in afterglow discharge
POSTER
Authors
-
Cezar-Mihai Gaman
-
Albert R. Ellingboe
- Dublin City University, Ireland
-
-
Mechanism of Electron Heating in Radio Frequency (RF) Capacitive Discharges
POSTER
Authors
-
Alan Wu
-
-
Optical Emission Measurements of Dual Frequency Capacitively Coupled Plasmas
POSTER
Authors
-
Eric Benck
-
Kristen Steffens
- National Institute of Standards and Technology
-
-
Electron density measurement in a dual frequency confined capacitive coupled plasma (DFC-CCP) processing tool using a floating hairpin resonance probe
POSTER
Authors
-
S.K. Karkari
-
A.R. Ellingboe
- Plasma Research Laboratory, NCPST, School of Physical Sciences, Dublin City University, Dublin-9, Ireland
- Dublin City University Physics Department
-
-
PLASMA DIAGNOSTICS II
COFFEE_KLATCH
-
Asymmetry reversal of ion collection by Mach probe in flowing unmagnetized plasma
POSTER
Authors
-
Eunsuk Ko
-
Xu Wang
-
Noah Hershkowitz
- Department of Engineering Physics, University of Wisconsin-Madison
- Dept. of Engineering Physics, University of Wisconsin - Madison
- D
- University of Wisconsin-Madison
-
Greg Severn
- Dept. of Physics, University of San Diego
- University of San Diego
-
-
Plasma Potential Fluctuation Measured by an Emissive Probe in Processing Plasma
POSTER
Authors
-
Dongsoo Lee
-
Noah Hershkowitz
- Department of Engineering Physics, University of Wisconsin-Madison
- Dept. of Engineering Physics, University of Wisconsin - Madison
- D
- University of Wisconsin-Madison
-
-
Electron Number Density Decay in Nitrogen Afterglow Using a Microwave Hairpin Resonator
POSTER
Authors
-
Nicholas Siefert
-
Biswa Ganguly
- Air Force Research Laboratory WPAFB
-
Greg Hebner
- Sandia National Lab
-
-
Electric field measurements by fluorescence-dip Stark spectroscopy
POSTER
Authors
-
Erik Wagenaars
-
G.M.W. Kroesen
- Eindhoven University of Technology, The Netherlands
- Eindhoven University of Technology
-
Mark Bowden
- The Open University, United Kingdom
-
-
Population Distribution of Atmospheric Pressure Argon Discharge Based on CR Model
POSTER
Authors
-
Hiroshi Akatsuka
- Tokyo Tech.
-
-
Measurement of Radical Density in an Atmospheric Plasma by Molecular Beam Mass Spectrometry
POSTER
Authors
-
Yolanda Aranda Gonzalvo
-
Alan Rees
-
Peter Hatton
-
Dave L. Seymour
-
Ian D. Neale
- Hiden Analytical Ltd., 420 Europa Boulevard, Warrington, WA5 7UN, England
-
-
Measurement of electric fields in plasma using Stark spectroscopy of krypton atoms
POSTER
Authors
-
Tao Jiang
- Eindhoven University of Technology
-
M.D. Bowden
- The Open University, UK
-
E. Wagenaars
-
G.M.W. Kroesen
- Eindhoven University of Technology
-
-
Biased hairpin probes
POSTER
Authors
-
Nicholas Braithwaite
-
Fred Haas
-
Jafar Al-Kuzee
- The Open University
-
-
GLOWS II
COFFEE_KLATCH
-
Self-consistent kinetic study of abnormal glow discharge plasmas
POSTER
Authors
-
Florian Sigeneger
- INP Greifswald, F.-L.-Jahn-Str. 19, 17489 Greifswald, Germany
-
Detlef Loffhagen
- INP Greifswald, F.-L.-Jahnstr. 19, 17489 Greifswald, Germany
-
-
Optical and Electrical Characteristics of AC Glow Discharge Plasma in N$_{2}$O
POSTER
Authors
-
H. Mart$\acute{i}$nez
- Centro de Ciencias F\'{i}sicas, UNAM
-
F.B. Yousif
- Facultad de Ciencias, UAEM
-
A. Robledo
- UAM, Acopotzalco
-
F. Castillo
- Instituto de Ciencias Nucleares, UNAM
-
A.B. Mondrag\'{o}n
- Facultad de Ciencias, UAEM
-
-
Dispersion of a Stationary Acoustic Shock in a Supersonic Flowing Afterglow
POSTER
Authors
-
Dereth Janette Drake
-
Reza Biazaran
-
Svetozar Popovic
-
Leposava Vuskovic
- Old Dominion University
-
-
Investigations of argon hollow cathode discharge with iron cathode
POSTER
Authors
-
J.F. Behnke
-
H. Scheibner
- Institut of Physics, University of Greifswald, Germany
-
H. Kersten
- Institute of Low Temperature Plasma Physics, 17489 Greifswald
-
H. Lieder
- OSRAM GmbH, D-81536 Munich, Germany
-
-
Investigation of a Micro-Hollow Cathode Discharge stability in different gases
POSTER
Authors
-
Xavier Aubert
-
Antoine Rousseau
- LPTP-Ecole Polytechnique CNRS, Palaiseau, France
- LPTP-Ecole Polytechnique-Palaiseau France
-
-
Dynamics of striations formed in a hollow anode covered by a dielectric layer
POSTER
Authors
-
V.N. Khudik
- Plasma Dynamics Corp., MI
-
A. Shvydky
- University of Toledo, OH
-
C.E. Theodosiou
- University of Toledo, OH
-
-
Expansion of a Dynamic Cathode Fall along the Dielectric Surface
POSTER
Authors
-
A. Shvydky
- University of Toledo, OH
-
V.N. Khudik
- Plasma Dynamics Corp., MI
-
V.P. Nagorny
- Plasma Dynamics Corp., MI
-
C.E. Theodosiou
- University of Toledo, OH
-
-
PLASMA DIAGNOSTICS I
COFFEE_KLATCH
-
Imaging spectrometer based on Fabry-Perot interferometer
POSTER
Authors
-
Aleksandr Kravchenko
-
Anatoly Khakhaev
-
Lidia Luizova
-
Aleksei Solovev
-
-
Experimental Details on Air-Plasma Measurements of Electron Density and Ozone Concentration
POSTER
Authors
-
Robert Vidmar
- University of Nevada, Reno
-
Kenneth Stalder
- Stalder Technologies and Research
-
Megan Seeley
- University of Nevada, Reno
-
-
A measurement of F metastables by laser absorption spectroscopy in a two frequency CCP
POSTER
Authors
-
Kenji Hayashi
-
Takeshi Ohmori
-
Takumi Akaike
- Keio University
-
Takeshi Kitajima
- National Defense Academy
- NDA, Keio University
-
Toshiaki Makabe
- Keio University
-
-
Optical emission CT for an effect of LF-bias voltage on a 2f-CCP for etching
POSTER
Authors
-
Takumi Akaike
- Keio University
-
Takeshi Ohmori
-
Kenji Hayashi
-
Mikio Ishimaru
- Keio University
-
Takeshi Kitajima
- National Defense Academy
- NDA, Keio University
-
Toshiaki Makabe
- Keio University
-
-
Investigation of Pulse-Modulation Effect in Electron Beam Excited Plasma with Time Resolved Optical Emission Spectroscopy
POSTER
Authors
-
Keigo Takeda
- Graduate School of Eng., Nagoya Univ.
-
Takayuki Ohta
-
Masafumi Ito
- Faculty of Systems Eng., Wakayama Univ.
-
Masaru Hori
- Dept. of Electrical Engineering and Computer Science, Nagoya Univ.
- Graduate School of Eng., Nagoya Univ.
- Nagoya Univ.
-
-
F$^-$ detection by CRDS in a dual-frequency capacitive plasma in Ar/C$_4$F$_8$/O$_2$
POSTER
Authors
-
Cormac Corr
-
Garrett Curley
-
Jean-Paul Booth
- LPTP, Ecole Polytechnique, 91128 Palaiseau, France
-
-
Characterization of the Lam 9100TCP plasma through atomic argon spectral lines
POSTER
Authors
-
Vladimir Milosavljevi\'{ c}
-
Albert R. Ellingboe
- Dublin City University, Ireland
-
-
Local Stochiometry Distortions in a Rotatable Magnetron Sputter Source measured by True 2D Imaging Spectroscopy
ORAL
Authors
-
Till Wallendorf
-
Swen Marke
- IfU Diagnostic Systems GmbH
-
Falk Milde
- Von Ardenne Anlagentechnik GmbH
-
-
Magnetic field measurements for N$_{2}$ and H$_{2}$ discharges from a low frequency RF inductively coupled plasma source
POSTER
Authors
-
Chandan Kumar Chakrabarty
- University Tenaga Nasional
-
-
BIOLOGICAL, ENVIRONMENTAL, AND OTHER INNOVATIVE APPLICATIONS
COFFEE_KLATCH
-
Investigation of Bacterial Biofilm Destruction Using Gas Discharge Plasma
POSTER
Authors
-
N. Abramzon
-
J. Bray
-
J.C. Joaquin
-
G. Brelles-Mari\~{n}o
- California State Polytechnic University, Pomona
-
-
Investigation of Sporicidal Effect of Gas Discharge Plasma
POSTER
Authors
-
Shawn Tseng
-
Wei-Jen Lin
-
Nina Abramzon
- California State Polytechnic University, Pomona
-
-
Purification of Gaseous Pollutant using Secondary Emission Electron Beam generated by Wire Discharge Plasma Source
POSTER
Authors
-
Masato Watanabe
-
Yusuke Sakai
-
Eiki Hotta
- Tokyo Institute of Technology
-
-
Infrared laser diagnostics of the plasma-photocatalyst interaction in a pulsed low pressure discharge
POSTER
Authors
-
Olivier Guaitella
-
Frederic Thevenet
-
Antoine Rousseau
- LPTP-Ecole Polytechnique CNRS, Palaiseau, France
- LPTP-Ecole Polytechnique-Palaiseau France
-
Chantal Guillard
- LACE-Lyon-France
-
Gabi Stancu
-
Jurgen Roepcke
- INP-Greifswald-Germany
-
-
Production of Syngas via Biomass Pyrolysis in Thermal Hydrogen/Oxygen Plasma
POSTER
Authors
-
Milan Hrabovsky
-
Michal Hlina
-
Milos Konrad
-
Vladimir Kopecky
- Institute of Plasma Physics AS CR, Prague
-
-
Spectroscopic study for abatement system for the global warming gases using VAWP
POSTER
Authors
-
Jiankun Wang
-
Ryohei Itatani
-
Tohru Yasuda
- Adtec Plasma Technology Co. Ltd, 5-6-10, Hikinocho, Fukuyama, Hiroshima, Japan
-
-
Model Study of the Pulsed Discharge Nozzle
POSTER
Authors
-
W.J.M. Brok
-
B.H.P. Broks
-
J. Remy
-
J.J.A.M. van der Mullen
- Eindhoven University of Technology, The Netherlands
- Eindhoven University of Technology
-
-
Surface dielectric barrier discharges as actuators for flow control
POSTER
Authors
-
Y. Lagmich
-
G. Hagelaar
-
L.C. Pitchford
-
J.P. Boeuf
- CPAT, CNRS and Univ P Sabatier, Toulouse, France
-
-
Measurement of the Absolute Concentration of Molecular Oxygen in a Capacitively-Coupled RF Discharge in a Martian Simulant Gas
POSTER
Authors
-
George Brooke
- Department of Physics and Astronomy, Virginia Military Institute, Lexington VA 24450
-
-
ARCS AND BREAKDOWN
COFFEE_KLATCH
-
Model Study of Breakdown in Low-Pressure Argon between Parabolic Electrodes
POSTER
Authors
-
W.J.M. Brok
-
E. Wagenaars
-
J.J.A.M. van der Mullen
- Eindhoven University of Technology, The Netherlands
- Eindhoven University of Technology
-
Mark Bowden
- The Open University, United Kingdom
-
-
Experimental study of breakdown in low-pressure argon between parabolic electrodes
POSTER
Authors
-
Erik Wagenaars
-
Niels Perri\"{e}ns
-
G.M.W. Kroesen
- Eindhoven University of Technology, The Netherlands
- Eindhoven University of Technology
-
Mark Bowden
- The Open University, United Kingdom
-
-
Characterization of Anode Boundary Layer of a High Intensity Arc with Cross Flow
POSTER
Authors
-
Guang Yang
-
Joachim Heberlein
-
Emil Pfender
- Department of Mechanical Engineering, University of Minnesota
-
-
Optical Emission Spectroscopy of an Atmospheric Arc
POSTER
Authors
-
Russell Rhoton
-
Mary Brake
- Eastern Michigan University, Ypsilanti, MI 48197
-
-
An Experimental Study of Cold Helium Arc-Jet Flowing along Diverging Magnetic Field
POSTER
Authors
-
Hiroshi Akatsuka
- Tokyo Tech.
-
Toshiaki Kanuma
-
Haruaki Matsuura
-
Mitsuo Matsuzaki
- Tokyo Tech.
-
-
ELECTRONEGATIVE PLASMAS
COFFEE_KLATCH
-
Modelling electronegative plasmas separated by an internal sheath
POSTER
Authors
-
Nicolas Plihon
-
Cormac Corr
-
Pascal Chabert
- Ecole Polytechnique
-
Jean-Luc Raimbault
- Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique, Palaiseau
-
Allan J. Lichtenberg
- Department of Electrical Engineering and Computer Science, University of California, Berkeley
-
-
Hairpin probes: time-resolution and electronegative plasma
POSTER
Authors
-
Nicholas Braithwaite
-
Eva Vasekova
-
Jafar Al-Kuzee
-
Mark Bowden
- The Open University
-
-
Negative Ions in Rare Gas/Oxygen Discharges
POSTER
Authors
-
M. Katsch
-
A. Wagner
- Universitaet Duisburg-Essen
-
-
Negative ion formation and motion in a mixture of $CCl_{4}$ and $Ar$
POSTER
Authors
-
F.B. Yousif
- Facultad de Ciencias-Universidad Aut\'{o}noma del Estado de Morelos
-
H. Mart\'{i}nez
- Centro de Ciencias F\'{i}sicas, Universidad Nacional Aut\'{o}noma de M\'{e}xico
-
A.B. Mondrag\'{o}n
- Facultad de Ciencias-Universidad Aut\'{o}noma del Estado de Morelos
-
-
Global Model of Electronegative Discharges for Neutral Radical Control
POSTER
Authors
-
Sungjin Kim
-
M.A. Lieberman
- University of California Berkeley
- Department of Electrical Engineering and Computer Science, University of California, Berkeley, USA
- University of California, Berkeley
-
A.J. Lichtenberg
- University of California, Berkeley
-
J.T. Gudmundsson
- University of Iceland, Reykjavik, Iceland
-
-
IONIZATION OF ATOMS AND MOLECULES
COFFEE_KLATCH
-
An Electron Momentum Spectroscopy, Density Functional and Greens Function Theories study of the Outer Valence Electronic Structure of Bicyclo[2.2.1]heptane-2,5-dione
POSTER
Authors
-
Michael Brunger
-
Darryl Jones
- School of Chemistry, Physics and Earth Sciences, Flinders University
-
Stefan Knippenberg
-
Jean-Pierre Francois
-
Michael Deleuze
- Department SBG, Limburgs Universitair Centrum
-
Saumitra Saha
-
Feng Wang
- Centre for Molecular Simulation and School of Information Technology, Swinburne University of Technology
-
Rolf Gleiter
-
Johannes Bueber
- Organic Chemistry Institute, University of Heidelberg
-
Dave Winkler
- CSIRO Molecular Science
-
-
Electron Impact Ionization of Silicontetrachloride (SiCl$_{4})$
POSTER
Authors
-
Ralf Basner
- INP Greifswald
-
Michael Gutkin
-
Jenny Mahoney
-
Vladimir Tarnovsky
- Stevens Institute of Technology
-
Hans Deutsch
- Institut fur Physik, Greifswald
-
Kurt H. Becker
- Stevens Institute of Technology
- Center for Environmental Systems, SIT
- Center for Environmental Systems, SIT, Hoboken, NJ, USA
- Stevens Institute of Technology and Center for Environmental Systems
-
-
Formation of positive ions of quadricyclane
POSTER
Authors
-
C.Q. Jiao
- Innovative Scientific Solutions, Inc., Dayton, OH
-
C.A. DeJoseph, Jr.
- Air Force Research Laboratory, Wright-Patterson AFB, OH 45433
- Air Force Research Laboratory, Wright-Patterson AFB, OH
-
R.H. Lee
-
A. Garscadden
- Air Force Research Laboratory, Wright-Patterson AFB, OH
-
-
Approximating the Green's Function in Evaluating Second-Order Amplitudes
POSTER
Authors
-
Zhangjin Chen
-
Don Madison
- Laboratory for Atomic and Molecular Research, University of Missouri-Rolla, Rolla, MO 65401
-
Klaus Bartschat
- Department of Physics and Astronomy, Drake University, Des Moines, Iowa 50311, USA
-
-
Electron-impact Fully Differential Cross Sections of Helium for Simultaneous Excitation- Ionization
POSTER
Authors
-
M. Foster
-
D.H. Madison
-
J.L. Peacher
-
A.L. Harris
- University of Missouri - Rolla
-
-
Experimental and Theoretical study of the Fully Differential Cross Section both in and out of the Scattering Plane for Electron-Impact Ionization of Magnesium
POSTER
Authors
-
M. Foster
-
D.H. Madison
-
J.L. Peacher
-
A. Walters
- University of Missouri - Rolla
-
R. VanBoeyen
-
M. Coplan
- University of Maryland, Department of Physics
-
-
Proton Impact Transfer-Ionization of Helium
POSTER
Authors
-
D.H. Madison
-
M. Foster
-
J.L. Peacher
- University of Missouri - Rolla
-
M. Schoeffler
-
R. Doerner
- Institut fur Kernphysik, Universitat Frankfurt
-
-
Ionization of silicon, germanium, tin, and lead by electron impact
POSTER
Authors
-
Philip Stone
-
Yong-Ki Kim
- NIST, Gaithersbur, MD
- NIST, Gaithersburg, MD
-
-
Ionization of neutral W and W$^+$ ion by electron impact
POSTER
Authors
-
Duch-Hee Kwon
-
Yong-Joo Rhee
- KAERI, Daejeon, Korea
-
Yong-Ki Kim
- NIST, Gaithersbur, MD
- NIST, Gaithersburg, MD
-