Poster Session II

Presentations

• CAPACITIVELY COUPLED PLASMAS

  COFFEE_KLATCH

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• Study of a capacitive discharge driven by three frequencies using inline RF metrology

  POSTER

  Authors

  • Steven Shannon

    • Applied Materials Incorporated

  • Joel Blackburn

    • Advanced Energy Incorporated

  • Daniel Hoffman

  • Valery Godyak

  • Jang Gyoo Yang

    • Applied Materials Incorporated

  • Stephen Rosenblum

    • Advanced Energy Incorporated

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• Diagnostics of a large size cylindrical CCP reactor

  POSTER

  Authors

  • Nevena Pua\v{c}

    • Institute of Physics, POB 68, 11080 Zemun, Belgrade, Serbia and Montenegro

  • Gordana Malovi\'c

    • Institute of Physics, POB 68, 11080 Zemun, Belgrade, Serbia and Montenegro

  • Antonije Djordjevi\'c

    • School of Electrical Engineering, Bulevar Kralja Aleksandra 73, 11000 Belgrade, Serbia and Montenegro

  • Zoran Petrovi\'c

    • Institute of Physics, POB 68, 11080 Zemun, Belgrade, Serbia and Montenegro
    • Institute of Physics, POB 68, 11080 Zemun, Belgrade,Serbia and Montenegro

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• Secondary electron effects in dual frequency discharges

  POSTER

  Authors

  • Miles M. Turner

    • Dublin City University, Ireland

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• Measurements of power dissipation in a capacitive sheath

  POSTER

  Authors

  • David Gahan

  • Michael B. Hopkins

  • Albert R. Ellingboe

    • Dublin City University, Ireland

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• Ignition conditions for peripheral plasma in a grounded chamber connected to a dual frequency capacitive discharge

  POSTER

  Authors

  • Sungjin Kim

  • M.A. Lieberman

    • University of California Berkeley
    • Department of Electrical Engineering and Computer Science, University of California, Berkeley, USA
    • University of California, Berkeley

  • A.J. Lichtenberg

    • University of California, Berkeley

  • J.T. Gudmundsson

    • University of Iceland, Reykjavik, Iceland

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• Stochastic heating in RF capacitive discharges

  POSTER

  Authors

  • E. Kawamura

  • M.A. Lieberman

    • University of California Berkeley
    • Department of Electrical Engineering and Computer Science, University of California, Berkeley, USA
    • University of California, Berkeley

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• Modeling of a 2f-CCP in SF$_6$/O$_2$ for high-speed MEMS processiong

  POSTER

  Authors

  • Fukutaro Hamaoka

  • Takashi Yagisawa

    • Keio University

  • Toshiaki Makabe

    • Keio University

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• Driving frequency effect on the heating mode transition in capacitive discharge

  POSTER

  Authors

  • ShinJae You

    • KAIST

  • SungSik Kim

    • KBSI

  • Hong Young Chang

    • KAIST
    • Korea Advanced Institute of Science and Technology

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• Time resolved investigations of hydrogen DFC-CCP plasma sheaths in afterglow discharge

  POSTER

  Authors

  • Cezar-Mihai Gaman

  • Albert R. Ellingboe

    • Dublin City University, Ireland

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• Mechanism of Electron Heating in Radio Frequency (RF) Capacitive Discharges

  POSTER

  Authors

  • Alan Wu

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• Optical Emission Measurements of Dual Frequency Capacitively Coupled Plasmas

  POSTER

  Authors

  • Eric Benck

  • Kristen Steffens

    • National Institute of Standards and Technology

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• Electron density measurement in a dual frequency confined capacitive coupled plasma (DFC-CCP) processing tool using a floating hairpin resonance probe

  POSTER

  Authors

  • S.K. Karkari

  • A.R. Ellingboe

    • Plasma Research Laboratory, NCPST, School of Physical Sciences, Dublin City University, Dublin-9, Ireland
    • Dublin City University Physics Department

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• PLASMA DIAGNOSTICS II

  COFFEE_KLATCH

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• Asymmetry reversal of ion collection by Mach probe in flowing unmagnetized plasma

  POSTER

  Authors

  • Eunsuk Ko

  • Xu Wang

  • Noah Hershkowitz

    • Department of Engineering Physics, University of Wisconsin-Madison
    • Dept. of Engineering Physics, University of Wisconsin - Madison
    • D
    • University of Wisconsin-Madison

  • Greg Severn

    • Dept. of Physics, University of San Diego
    • University of San Diego

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• Plasma Potential Fluctuation Measured by an Emissive Probe in Processing Plasma

  POSTER

  Authors

  • Dongsoo Lee

  • Noah Hershkowitz

    • Department of Engineering Physics, University of Wisconsin-Madison
    • Dept. of Engineering Physics, University of Wisconsin - Madison
    • D
    • University of Wisconsin-Madison

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• Electron Number Density Decay in Nitrogen Afterglow Using a Microwave Hairpin Resonator

  POSTER

  Authors

  • Nicholas Siefert

  • Biswa Ganguly

    • Air Force Research Laboratory WPAFB

  • Greg Hebner

    • Sandia National Lab

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• Electric field measurements by fluorescence-dip Stark spectroscopy

  POSTER

  Authors

  • Erik Wagenaars

  • G.M.W. Kroesen

    • Eindhoven University of Technology, The Netherlands
    • Eindhoven University of Technology

  • Mark Bowden

    • The Open University, United Kingdom

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• Population Distribution of Atmospheric Pressure Argon Discharge Based on CR Model

  POSTER

  Authors

  • Hiroshi Akatsuka

    • Tokyo Tech.

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• Measurement of Radical Density in an Atmospheric Plasma by Molecular Beam Mass Spectrometry

  POSTER

  Authors

  • Yolanda Aranda Gonzalvo

  • Alan Rees

  • Peter Hatton

  • Dave L. Seymour

  • Ian D. Neale

    • Hiden Analytical Ltd., 420 Europa Boulevard, Warrington, WA5 7UN, England

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• Measurement of electric fields in plasma using Stark spectroscopy of krypton atoms

  POSTER

  Authors

  • Tao Jiang

    • Eindhoven University of Technology

  • M.D. Bowden

    • The Open University, UK

  • E. Wagenaars

  • G.M.W. Kroesen

    • Eindhoven University of Technology

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• Biased hairpin probes

  POSTER

  Authors

  • Nicholas Braithwaite

  • Fred Haas

  • Jafar Al-Kuzee

    • The Open University

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• GLOWS II

  COFFEE_KLATCH

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• Self-consistent kinetic study of abnormal glow discharge plasmas

  POSTER

  Authors

  • Florian Sigeneger

    • INP Greifswald, F.-L.-Jahn-Str. 19, 17489 Greifswald, Germany

  • Detlef Loffhagen

    • INP Greifswald, F.-L.-Jahnstr. 19, 17489 Greifswald, Germany

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• Optical and Electrical Characteristics of AC Glow Discharge Plasma in N$_{2}$O

  POSTER

  Authors

  • H. Mart$\acute{i}$nez

    • Centro de Ciencias F\'{i}sicas, UNAM

  • F.B. Yousif

    • Facultad de Ciencias, UAEM

  • A. Robledo

    • UAM, Acopotzalco

  • F. Castillo

    • Instituto de Ciencias Nucleares, UNAM

  • A.B. Mondrag\'{o}n

    • Facultad de Ciencias, UAEM

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• Dispersion of a Stationary Acoustic Shock in a Supersonic Flowing Afterglow

  POSTER

  Authors

  • Dereth Janette Drake

  • Reza Biazaran

  • Svetozar Popovic

  • Leposava Vuskovic

    • Old Dominion University

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• Investigations of argon hollow cathode discharge with iron cathode

  POSTER

  Authors

  • J.F. Behnke

  • H. Scheibner

    • Institut of Physics, University of Greifswald, Germany

  • H. Kersten

    • Institute of Low Temperature Plasma Physics, 17489 Greifswald

  • H. Lieder

    • OSRAM GmbH, D-81536 Munich, Germany

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• Investigation of a Micro-Hollow Cathode Discharge stability in different gases

  POSTER

  Authors

  • Xavier Aubert

  • Antoine Rousseau

    • LPTP-Ecole Polytechnique CNRS, Palaiseau, France
    • LPTP-Ecole Polytechnique-Palaiseau France

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• Dynamics of striations formed in a hollow anode covered by a dielectric layer

  POSTER

  Authors

  • V.N. Khudik

    • Plasma Dynamics Corp., MI

  • A. Shvydky

    • University of Toledo, OH

  • C.E. Theodosiou

    • University of Toledo, OH

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• Expansion of a Dynamic Cathode Fall along the Dielectric Surface

  POSTER

  Authors

  • A. Shvydky

    • University of Toledo, OH

  • V.N. Khudik

    • Plasma Dynamics Corp., MI

  • V.P. Nagorny

    • Plasma Dynamics Corp., MI

  • C.E. Theodosiou

    • University of Toledo, OH

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• PLASMA DIAGNOSTICS I

  COFFEE_KLATCH

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• Imaging spectrometer based on Fabry-Perot interferometer

  POSTER

  Authors

  • Aleksandr Kravchenko

  • Anatoly Khakhaev

  • Lidia Luizova

  • Aleksei Solovev

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• Experimental Details on Air-Plasma Measurements of Electron Density and Ozone Concentration

  POSTER

  Authors

  • Robert Vidmar

    • University of Nevada, Reno

  • Kenneth Stalder

    • Stalder Technologies and Research

  • Megan Seeley

    • University of Nevada, Reno

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• A measurement of F metastables by laser absorption spectroscopy in a two frequency CCP

  POSTER

  Authors

  • Kenji Hayashi

  • Takeshi Ohmori

  • Takumi Akaike

    • Keio University

  • Takeshi Kitajima

    • National Defense Academy
    • NDA, Keio University

  • Toshiaki Makabe

    • Keio University

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• Optical emission CT for an effect of LF-bias voltage on a 2f-CCP for etching

  POSTER

  Authors

  • Takumi Akaike

    • Keio University

  • Takeshi Ohmori

  • Kenji Hayashi

  • Mikio Ishimaru

    • Keio University

  • Takeshi Kitajima

    • National Defense Academy
    • NDA, Keio University

  • Toshiaki Makabe

    • Keio University

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• Investigation of Pulse-Modulation Effect in Electron Beam Excited Plasma with Time Resolved Optical Emission Spectroscopy

  POSTER

  Authors

  • Keigo Takeda

    • Graduate School of Eng., Nagoya Univ.

  • Takayuki Ohta

  • Masafumi Ito

    • Faculty of Systems Eng., Wakayama Univ.

  • Masaru Hori

    • Dept. of Electrical Engineering and Computer Science, Nagoya Univ.
    • Graduate School of Eng., Nagoya Univ.
    • Nagoya Univ.

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• F$^-$ detection by CRDS in a dual-frequency capacitive plasma in Ar/C$_4$F$_8$/O$_2$

  POSTER

  Authors

  • Cormac Corr

  • Garrett Curley

  • Jean-Paul Booth

    • LPTP, Ecole Polytechnique, 91128 Palaiseau, France

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• Characterization of the Lam 9100TCP plasma through atomic argon spectral lines

  POSTER

  Authors

  • Vladimir Milosavljevi\'{ c}

  • Albert R. Ellingboe

    • Dublin City University, Ireland

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• Local Stochiometry Distortions in a Rotatable Magnetron Sputter Source measured by True 2D Imaging Spectroscopy

  ORAL

  Authors

  • Till Wallendorf

  • Swen Marke

    • IfU Diagnostic Systems GmbH

  • Falk Milde

    • Von Ardenne Anlagentechnik GmbH

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• Magnetic field measurements for N$_{2}$ and H$_{2}$ discharges from a low frequency RF inductively coupled plasma source

  POSTER

  Authors

  • Chandan Kumar Chakrabarty

    • University Tenaga Nasional

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• BIOLOGICAL, ENVIRONMENTAL, AND OTHER INNOVATIVE APPLICATIONS

  COFFEE_KLATCH

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• Investigation of Bacterial Biofilm Destruction Using Gas Discharge Plasma

  POSTER

  Authors

  • N. Abramzon

  • J. Bray

  • J.C. Joaquin

  • G. Brelles-Mari\~{n}o

    • California State Polytechnic University, Pomona

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• Investigation of Sporicidal Effect of Gas Discharge Plasma

  POSTER

  Authors

  • Shawn Tseng

  • Wei-Jen Lin

  • Nina Abramzon

    • California State Polytechnic University, Pomona

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• Purification of Gaseous Pollutant using Secondary Emission Electron Beam generated by Wire Discharge Plasma Source

  POSTER

  Authors

  • Masato Watanabe

  • Yusuke Sakai

  • Eiki Hotta

    • Tokyo Institute of Technology

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• Infrared laser diagnostics of the plasma-photocatalyst interaction in a pulsed low pressure discharge

  POSTER

  Authors

  • Olivier Guaitella

  • Frederic Thevenet

  • Antoine Rousseau

    • LPTP-Ecole Polytechnique CNRS, Palaiseau, France
    • LPTP-Ecole Polytechnique-Palaiseau France

  • Chantal Guillard

    • LACE-Lyon-France

  • Gabi Stancu

  • Jurgen Roepcke

    • INP-Greifswald-Germany

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• Production of Syngas via Biomass Pyrolysis in Thermal Hydrogen/Oxygen Plasma

  POSTER

  Authors

  • Milan Hrabovsky

  • Michal Hlina

  • Milos Konrad

  • Vladimir Kopecky

    • Institute of Plasma Physics AS CR, Prague

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• Spectroscopic study for abatement system for the global warming gases using VAWP

  POSTER

  Authors

  • Jiankun Wang

  • Ryohei Itatani

  • Tohru Yasuda

    • Adtec Plasma Technology Co. Ltd, 5-6-10, Hikinocho, Fukuyama, Hiroshima, Japan

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• Model Study of the Pulsed Discharge Nozzle

  POSTER

  Authors

  • W.J.M. Brok

  • B.H.P. Broks

  • J. Remy

  • J.J.A.M. van der Mullen

    • Eindhoven University of Technology, The Netherlands
    • Eindhoven University of Technology

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• Surface dielectric barrier discharges as actuators for flow control

  POSTER

  Authors

  • Y. Lagmich

  • G. Hagelaar

  • L.C. Pitchford

  • J.P. Boeuf

    • CPAT, CNRS and Univ P Sabatier, Toulouse, France

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• Measurement of the Absolute Concentration of Molecular Oxygen in a Capacitively-Coupled RF Discharge in a Martian Simulant Gas

  POSTER

  Authors

  • George Brooke

    • Department of Physics and Astronomy, Virginia Military Institute, Lexington VA 24450

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• ARCS AND BREAKDOWN

  COFFEE_KLATCH

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• Model Study of Breakdown in Low-Pressure Argon between Parabolic Electrodes

  POSTER

  Authors

  • W.J.M. Brok

  • E. Wagenaars

  • J.J.A.M. van der Mullen

    • Eindhoven University of Technology, The Netherlands
    • Eindhoven University of Technology

  • Mark Bowden

    • The Open University, United Kingdom

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• Experimental study of breakdown in low-pressure argon between parabolic electrodes

  POSTER

  Authors

  • Erik Wagenaars

  • Niels Perri\"{e}ns

  • G.M.W. Kroesen

    • Eindhoven University of Technology, The Netherlands
    • Eindhoven University of Technology

  • Mark Bowden

    • The Open University, United Kingdom

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• Characterization of Anode Boundary Layer of a High Intensity Arc with Cross Flow

  POSTER

  Authors

  • Guang Yang

  • Joachim Heberlein

  • Emil Pfender

    • Department of Mechanical Engineering, University of Minnesota

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• Optical Emission Spectroscopy of an Atmospheric Arc

  POSTER

  Authors

  • Russell Rhoton

  • Mary Brake

    • Eastern Michigan University, Ypsilanti, MI 48197

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• An Experimental Study of Cold Helium Arc-Jet Flowing along Diverging Magnetic Field

  POSTER

  Authors

  • Hiroshi Akatsuka

    • Tokyo Tech.

  • Toshiaki Kanuma

  • Haruaki Matsuura

  • Mitsuo Matsuzaki

    • Tokyo Tech.

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• ELECTRONEGATIVE PLASMAS

  COFFEE_KLATCH

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• Modelling electronegative plasmas separated by an internal sheath

  POSTER

  Authors

  • Nicolas Plihon

  • Cormac Corr

  • Pascal Chabert

    • Ecole Polytechnique

  • Jean-Luc Raimbault

    • Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique, Palaiseau

  • Allan J. Lichtenberg

    • Department of Electrical Engineering and Computer Science, University of California, Berkeley

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• Hairpin probes: time-resolution and electronegative plasma

  POSTER

  Authors

  • Nicholas Braithwaite

  • Eva Vasekova

  • Jafar Al-Kuzee

  • Mark Bowden

    • The Open University

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• Negative Ions in Rare Gas/Oxygen Discharges

  POSTER

  Authors

  • M. Katsch

  • A. Wagner

    • Universitaet Duisburg-Essen

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• Negative ion formation and motion in a mixture of $CCl_{4}$ and $Ar$

  POSTER

  Authors

  • F.B. Yousif

    • Facultad de Ciencias-Universidad Aut\'{o}noma del Estado de Morelos

  • H. Mart\'{i}nez

    • Centro de Ciencias F\'{i}sicas, Universidad Nacional Aut\'{o}noma de M\'{e}xico

  • A.B. Mondrag\'{o}n

    • Facultad de Ciencias-Universidad Aut\'{o}noma del Estado de Morelos

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• Global Model of Electronegative Discharges for Neutral Radical Control

  POSTER

  Authors

  • Sungjin Kim

  • M.A. Lieberman

    • University of California Berkeley
    • Department of Electrical Engineering and Computer Science, University of California, Berkeley, USA
    • University of California, Berkeley

  • A.J. Lichtenberg

    • University of California, Berkeley

  • J.T. Gudmundsson

    • University of Iceland, Reykjavik, Iceland

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• IONIZATION OF ATOMS AND MOLECULES

  COFFEE_KLATCH

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• An Electron Momentum Spectroscopy, Density Functional and Greens Function Theories study of the Outer Valence Electronic Structure of Bicyclo[2.2.1]heptane-2,5-dione

  POSTER

  Authors

  • Michael Brunger

  • Darryl Jones

    • School of Chemistry, Physics and Earth Sciences, Flinders University

  • Stefan Knippenberg

  • Jean-Pierre Francois

  • Michael Deleuze

    • Department SBG, Limburgs Universitair Centrum

  • Saumitra Saha

  • Feng Wang

    • Centre for Molecular Simulation and School of Information Technology, Swinburne University of Technology

  • Rolf Gleiter

  • Johannes Bueber

    • Organic Chemistry Institute, University of Heidelberg

  • Dave Winkler

    • CSIRO Molecular Science

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• Electron Impact Ionization of Silicontetrachloride (SiCl$_{4})$

  POSTER

  Authors

  • Ralf Basner

    • INP Greifswald

  • Michael Gutkin

  • Jenny Mahoney

  • Vladimir Tarnovsky

    • Stevens Institute of Technology

  • Hans Deutsch

    • Institut fur Physik, Greifswald

  • Kurt H. Becker

    • Stevens Institute of Technology
    • Center for Environmental Systems, SIT
    • Center for Environmental Systems, SIT, Hoboken, NJ, USA
    • Stevens Institute of Technology and Center for Environmental Systems

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• Formation of positive ions of quadricyclane

  POSTER

  Authors

  • C.Q. Jiao

    • Innovative Scientific Solutions, Inc., Dayton, OH

  • C.A. DeJoseph, Jr.

    • Air Force Research Laboratory, Wright-Patterson AFB, OH 45433
    • Air Force Research Laboratory, Wright-Patterson AFB, OH

  • R.H. Lee

  • A. Garscadden

    • Air Force Research Laboratory, Wright-Patterson AFB, OH

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• Approximating the Green's Function in Evaluating Second-Order Amplitudes

  POSTER

  Authors

  • Zhangjin Chen

  • Don Madison

    • Laboratory for Atomic and Molecular Research, University of Missouri-Rolla, Rolla, MO 65401

  • Klaus Bartschat

    • Department of Physics and Astronomy, Drake University, Des Moines, Iowa 50311, USA

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• Electron-impact Fully Differential Cross Sections of Helium for Simultaneous Excitation- Ionization

  POSTER

  Authors

  • M. Foster

  • D.H. Madison

  • J.L. Peacher

  • A.L. Harris

    • University of Missouri - Rolla

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• Experimental and Theoretical study of the Fully Differential Cross Section both in and out of the Scattering Plane for Electron-Impact Ionization of Magnesium

  POSTER

  Authors

  • M. Foster

  • D.H. Madison

  • J.L. Peacher

  • A. Walters

    • University of Missouri - Rolla

  • R. VanBoeyen

  • M. Coplan

    • University of Maryland, Department of Physics

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• Proton Impact Transfer-Ionization of Helium

  POSTER

  Authors

  • D.H. Madison

  • M. Foster

  • J.L. Peacher

    • University of Missouri - Rolla

  • M. Schoeffler

  • R. Doerner

    • Institut fur Kernphysik, Universitat Frankfurt

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• Ionization of silicon, germanium, tin, and lead by electron impact

  POSTER

  Authors

  • Philip Stone

  • Yong-Ki Kim

    • NIST, Gaithersbur, MD
    • NIST, Gaithersburg, MD

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• Ionization of neutral W and W$^+$ ion by electron impact

  POSTER

  Authors

  • Duch-Hee Kwon

  • Yong-Joo Rhee

    • KAERI, Daejeon, Korea

  • Yong-Ki Kim

    • NIST, Gaithersbur, MD
    • NIST, Gaithersburg, MD

  View abstract →