Inductively Coupled Plasmas

Presentations

• 2D Fluid Simulation of VHF{\_}ICP Source with Parallel Resonance Antenna for Next Generation Etch Processing

  ORAL

  Oct. 19, 2005, 7:00 AM – Oct. 19, 2005, 7:15 AM

  Authors

  • S.H. Lee

  • Jae Koo Lee

    • Pohang University of Science and Technology, South Korea
    • Department of Electronics and Electrical Engineering, Pohang University of Science and Technology, S.Korea
    • Pohang University of Science and Technology
    • Pohang University of Science and Technology, S.Korea

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• Numerical Study of Hysteresis Phenomenon in an Inductively Coupled Plasma in Ar

  ORAL

  Oct. 19, 2005, 7:15 AM – Oct. 19, 2005, 7:30 AM

  Authors

  • Toshikazu Sato

  • Toshiaki Makabe

    • Keio University

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• Investigations on an inductively coupled magnetic neutral loop discharge

  ORAL

  Oct. 19, 2005, 7:30 AM – Oct. 19, 2005, 7:45 AM

  Authors

  • Deborah O'Connell

  • Dragos Crintea

  • Martin Brennscheidt

  • Timo Gans

  • Uwe Czarnetzki

    • Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany

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• Electrical and Plasma Parameters of Distributed ICP Driven by Ferromagnetic Core Array

  ORAL

  Oct. 19, 2005, 7:45 AM – Oct. 19, 2005, 8:00 AM

  Authors

  • WonKi Lee

  • ChinWook Chung

    • HanYang University

  • V.A. Godyak

    • OSRAM Sylvania

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• Investigations of the E-H transition in an inductively coupled plasma using phase resolved optical emission spectroscopy

  ORAL

  Oct. 19, 2005, 8:00 AM – Oct. 19, 2005, 8:15 AM

  Authors

  • Deborah O'Connell

  • Timo Gans

  • Uwe Czarnetzki

    • Institute for Plasma and Atomic Physics, Ruhr University Bochum, Germany

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• Comparison of Model and Experiment for Ar/O$_{2}$ Inductively Coupled Plasmas

  ORAL

  Oct. 19, 2005, 8:15 AM – Oct. 19, 2005, 8:30 AM

  Authors

  • C.C. Hsu

  • M.A. Nierode

  • J.W. Coburn

  • D.B. Graves

    • University of California at Berkeley

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• Plasma Characteristics of Industrial Transformer Coupled Plasma

  ORAL

  Oct. 19, 2005, 8:30 AM – Oct. 19, 2005, 8:45 AM

  Authors

  • L. Oksuz

  • A.R. Ellingboe

    • Plasma Research Laboratory, NCPST, School of Physical Sciences, Dublin City University, Dublin-9, Ireland
    • Dublin City University Physics Department

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• Comparison of ICP with and without ferromagnetic core

  ORAL

  Oct. 19, 2005, 8:45 AM – Oct. 19, 2005, 9:00 AM

  Authors

  • Valery Godyak

  • Benjamen Alexandrovich

    • Osram Sylvania

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