Poster Session I

Presentations

• MATERIAL PROCESSING

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• Low Pressure PECVD of SiO$_{x}$N$_{y}$ Thin Films with Electron-Beam Generated Plasmas

  POSTER

  Authors

  • D. Leonhardt

    • Plasma Physics Div., Naval Research Lab

  • S.G. Walton

    • Naval Research Laboratory

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• Niobium surface modification in a microwave discharge

  POSTER

  Authors

  • Marija Raskovic

  • Svetozar Popovic

  • Leposava Vuskovic

    • Old Dominion University

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• Anisotropic fluorocarbon plasma etching of Si/SiGe heterostructures

  POSTER

  Authors

  • Ruhang Ding

  • Amy Wendt

  • Levente Klein

  • Mark Eriksson

    • University of Wisconsin - Madison

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• Industrial Carbon-Doped SiO$_2$ (CDO) Film Etching in Ar/O$_2$/c-C$_4$F$_8$ High Density Plasmas

  POSTER

  Authors

  • A. Islyaikin

  • V. Krastev

  • I. Reid

  • G. Hughes

  • A.R. Ellingboe

    • Dublin City University, Ireland

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• Three-dimensional etching profile simulation using level set methods

  POSTER

  Authors

  • Gon Jun Kim

  • Sung Jin Kim

    • Pohang University of Science and Technology

  • Branislav Radjenovic

  • Jae Koo Lee

    • Pohang University of Science and Technology, South Korea
    • Department of Electronics and Electrical Engineering, Pohang University of Science and Technology, S.Korea
    • Pohang University of Science and Technology
    • Pohang University of Science and Technology, S.Korea

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• Ti Surface Oxidization by Microwave Discharge Oxygen Plasma and Plasma Parameters

  POSTER

  Authors

  • Satoru Kakizaka

  • Takeshi Sakamoto

  • Haruaki Matsuura

  • Hiroshi Akatsuka

    • Tokyo Institute of Technology

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• Plasma CVD of a-C:F Films Using C$_8$F$_{18}$ and Characterization of their Properties

  POSTER

  Authors

  • Yosuke Sakai

  • Shota Tazawa

  • Yoshiyuki Suda

  • Hirotake Sugawara

    • Hokkaido University

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• Noninvasive Measurement of Ion Energy Distributions in a Plasma Etching System

  POSTER

  Authors

  • SeJin Oh

  • Chinwook Chung

    • Division of Electrical Engineering, Hanyang University

  • SungHo Cha

  • GiChung Kwon

    • JuSung Engineering Ltd.
    • Jusung Engineering Corporation

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• Laser Ablation Plasma Deposition and Ion Implantation of Hafnium and Hafnium-Oxide Thin Films*

  POSTER

  Authors

  • Nicholas M. Jordan

  • Ron Gilgenbach

  • Michael Jones

  • Lumin Wang

  • Sha Zhu

  • Michael Atzmon

  • Dongchan Jang

  • Y.Y. Lau

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• MAGNETICALLY ENHANCED PLASMAS

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• Resolving the Plasma Sheath Layer in Two--Dimensional Magnetized Discharges

  POSTER

  Authors

  • Mark Carter

  • Philip Ryan

    • Oak Ridge National Laboratory

  • Daniel Hoffman

    • Applied Materials

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• Biased substrate effects on ion characteristics in magnetized inductively coupled plasma

  POSTER

  Authors

  • Sanghyun Jun

  • Hong Young Chang

    • KAIST
    • Korea Advanced Institute of Science and Technology

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• Time-Resolved Optical Emission Studies of Pulsed DC Magnetron Plasmas

  POSTER

  Authors

  • Jose Lopez

    • Stevens Institute of Technology, Hoboken, NJ, USA

  • WeiDong Zhu

    • Stevens Institute of Technology

  • Abraham Belkind

    • Stevens Institute of Technology

  • Kurt H. Becker

    • Stevens Institute of Technology
    • Center for Environmental Systems, SIT
    • Center for Environmental Systems, SIT, Hoboken, NJ, USA
    • Stevens Institute of Technology and Center for Environmental Systems

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• INDUCTIVELY COUPLED PLASMAS

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• Model and Measurements for Closed Loop Control of an Inductively Coupled Plasma Source

  POSTER

  Authors

  • Bernard Keville

  • Petar Iordanov

  • Declan Doherty

    • National University of Ireland, Maynooth, Ireland

  • Michael B. Hopkins

  • Ronan Faulkner

    • Dublin City University, Ireland

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• Investigation of inductively coupled CF$_4$/O$_2$ discharges by Langmuir probe method and optical emission spectroscopy

  POSTER

  Authors

  • Takashi Kimura

  • Masahisa Noto

    • Nagoya Institute of Technology

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• Improvement in Uniformity of Linear Inductively Coupled Plasma for Large Area Processing

  POSTER

  Authors

  • S.M. Choi

  • S.H. Lee

  • Jae Koo Lee

    • Pohang University of Science and Technology, South Korea
    • Department of Electronics and Electrical Engineering, Pohang University of Science and Technology, S.Korea
    • Pohang University of Science and Technology
    • Pohang University of Science and Technology, S.Korea

  • K.N. Kim

  • G.Y. Yeom

    • Sungkyunkwan University, Korea

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• Chlorine atom measurements in Ar:Cl$_{2}$ discharges.

  POSTER

  Authors

  • F.G. Marro

    • Queen's University Belfast, Northern Ireland

  • William Graham

    • Queen's University Belfast
    • Queen's University Belfast, Northern Ireland
    • Physics and Astronomy, Queen's University Belfast, Northern Ireland

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• Study of non-local electron kinetics in a low-pressure afterglow argon plasma

  POSTER

  Authors

  • Sergey Gorchakov

  • Florian Sigeneger

  • Dirk Uhrlandt

    • INP Greifswald, F.-L.-Jahn-Str. 19, 17489 Greifswald, Germany

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• Optical emission and self mode transition of low frequency inductively coupled plasmas driven by crossed internal oscillating currents

  POSTER

  Authors

  • YuPing Ren

  • Pavlo Rutkevych

    • PSAC/NIE/NTU, Singapore
    • Plasma Sources and Applications Center, NIE, Nanyang Technological University, Singapore

  • JiDong Long

  • QiJin Cheng

  • ShuYan Xu

    • PSAC/NIE/NTU, Singapore

  • Kostya Ostrikov

    • School of Physics, The University of Sydney, Australia

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• Neutral gas collisional heating and the 0D/1D modeling in a semiconductor plasma reactor

  POSTER

  Authors

  • Masashi Shimada

  • George R. Tynan

    • Department of Mechanical and Aerospace Engineering, University of California, San Diego

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• PLASMA BOUNDARIES

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• Consistent matching of plasma and sheath

  POSTER

  Authors

  • Karl-Ulrich Riemann

    • Ruhr-University, D 4470 Bochum, Germany
    • Ruhr-University, D 44780 Bochum, Germany

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• A bounded active magnetized plasma over a wide range of collisionality

  POSTER

  Authors

  • Raoul Franklin

    • The Open University

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• Investigation of a Planar Langmuir Probe Orientated Parallel to the direct of Flow in a Laser Ablation Plasma

  POSTER

  Authors

  • Peter Sheerin

  • Miles M. Turner

    • Dublin City University, Ireland

  • Brendan Doggett

  • James G. Lunney

    • Trinity College Dublin, Ireland

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• Energy Distributions of Ion Drift to the Cathode in a DC Microdischarge

  POSTER

  Authors

  • Tsuyohito Ito

  • Mark Cappelli

    • Stanford University

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• Different modes of arc attachment at HID cathodes: Simulation and comparison to measurements

  POSTER

  Authors

  • Oliver Langenscheidt

  • Lars Dabringhausen

  • Stefan Lichtenberg

  • Juergen Mentel

  • Peter Awakowicz

    • Ruhr-University of Bochum

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• Studies of sheath physics in two ion species plasmas with diode laser LIF

  POSTER

  Authors

  • Greg Severn

    • Dept. of Physics, University of San Diego
    • University of San Diego

  • Noah Hershkowitz

    • Department of Engineering Physics, University of Wisconsin-Madison
    • Dept. of Engineering Physics, University of Wisconsin - Madison
    • D
    • University of Wisconsin-Madison

  • M.M. Turner

    • Dublin City University, Dublin Ireland

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• Effect of bombarding ion energy distribution on ion/surface interaction during fluorocarbon plasma etching

  POSTER

  Authors

  • Amy Wendt

  • Shuntel Williams

  • Yuk-Hong Ting

    • University of Wisconsin-Madison

  • Satoshi Hamaguchi

    • Osaka University

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• Photoresist covered wafer charging effects in pulsed plasma assisted ion implantation

  POSTER

  Authors

  • Ji Hyun Hur

  • Gyung Soo Keum

  • Jae Hyung Won

  • Jae Joon Oh

  • Jai Kwang Shin

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• GLOWS I

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• A multi-beam model for low-current, very high E/N discharges in hydrogen.

  POSTER

  Authors

  • A.V. Phelps

    • JILA, University of Colorado and NIST

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• NO kinetics in pulsed DC low-pressure discharge: influence of TiO$_{2}$ surface

  POSTER

  Authors

  • Lina Gatilova

  • Olivier Guaitella

  • Antoine Rousseau

    • LPTP-Ecole Polytechnique CNRS, Palaiseau, France
    • LPTP-Ecole Polytechnique-Palaiseau France

  • Yury Ionikh

    • St Petersburgh State University-Russia

  • Stefan Welzel

  • Jurgen Roepcke

    • INP-Greifswald-Germany

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• Benchmark simulations of electronegative discharges

  POSTER

  Authors

  • Derek Monahan

  • Miles M. Turner

    • Dublin City University, Ireland

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• Critical Evaluation of the Global Model Approximation

  POSTER

  Authors

  • Derek Monahan

  • Miles M. Turner

    • Dublin City University, Ireland

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• Characterization of pulsed discharges for next-generation plasma processes

  POSTER

  Authors

  • Sang-Hun Seo

  • Shin-Jae You

    • KAIST

  • Dong-Seok Lee

    • Samsung Electronics

  • Sang-Won Lee

    • Plasmart Co.

  • Hong-Young Chang

    • KAIST

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• Observations of Ionization Waves in Argon Glow Discharges using a Microwave Hairpin Resonator

  POSTER

  Authors

  • Nicholas Siefert

  • Biswa Ganguly

    • Air Force Research Laboratory WPAFB

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• ELECTRON AND POSITRON COLLISIONS WITH ATOMS AND MOLECULES

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• Benchmark calculations for electron collisions with FeII

  POSTER

  Authors

  • Oleg Zatsarinny

  • Klaus Bartschat

    • Drake University, Department of Physics and Astronomy, Des Moines, IA 50311
    • Drake University

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• Ground and Excited State Cross Sections for Electron Impact on Cesium

  POSTER

  Authors

  • Sean Sutton

  • William McConkey

  • Michal Lukomski

  • TImothy Reddish

  • Wladek Kedzierski

    • University of Windsor

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• Optical potential calculation of elastic electron scattering from heavy noble gases

  POSTER

  Authors

  • Allan Stauffer

    • York University, Toronto, Canada

  • Robert McEachran

    • Australian National University, Canberra, Australia

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• A New, High-Resolution Positron Beamline

  POSTER

  Authors

  • James Sullivan

  • Violaine Vizcaino

  • Jens Huft

  • Gerard Atkinson

    • Australian National University

  • Adric Jones

    • Flinders University

  • Stephen Buckman

    • Australian National University

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• Elastic and Vibrational Cross Sections in Methane and Cyclopropane

  POSTER

  Authors

  • Michael Allan

    • University of Fribourg

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• Measurement of the Elastic and Vibrational Cross Sections in N$_2$ Over a Wide Angular Range

  POSTER

  Authors

  • Michael Allan

    • University of Fribourg

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• Rydberg-Like Feshbach Resonances in Dissociative Electron Attachment to Amines and Alcohols

  POSTER

  Authors

  • Michael Allan

    • University of Fribourg

  • Bogdan Ibanescu

  • Svetlana Zivanov

  • Olivier May

  • Patric Oulevey

    • University of Fribourg

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• A method for measuring optical cross sections for electron impact excitation from metastable states

  POSTER

  Authors

  • C.A. DeJoseph, Jr.

    • Air Force Research Laboratory, Wright-Patterson AFB, OH 45433
    • Air Force Research Laboratory, Wright-Patterson AFB, OH

  • V.I. Demidov

    • UES, Inc., Dayton, OH

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• A global (volume averaged) model of a nitrogen discharge

  POSTER

  Authors

  • Jon T. Gudmundsson

  • Narfi T. Snorrason

    • Science Institute, University of Iceland, Reykjavik, Iceland

  • Sungjin Kim

  • Michael A. Lieberman

    • Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA 94720-1770

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• Electron excitation coefficients in oxygen

  POSTER

  Authors

  • Vladimir \v{S}amara

  • \v{Z}eljka Nikitovi\'c

  • Gordana Malovi\'c

  • Zoran Petrovi\'c

    • Institute of Physics, POB 68, 11080 Zemun, Belgrade, Serbia and Montenegro
    • Institute of Physics, POB 68, 11080 Zemun, Belgrade,Serbia and Montenegro

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• HIGH PRESSURE PLASMA PHYSICS AND CHEMISTRY

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• Experimental study on atmospheric pressure RF capacitive He/O$_2$ discharges

  POSTER

  Authors

  • Takashi Kimura

  • Yosuke Hattori

  • Takamasa Hanai

    • Nagoya Institute of Technology

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• Gas Temperature and Metastable Density Measurements in Ar/H$_{2 }$DBD Using Diode-Laser Absorption Spectroscopy

  POSTER

  Authors

  • Robert Leiweke

  • Biswa Ganguly

    • Air Force Research Laboratory WPAFB

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• Two-dimensional numerical study of atmospheric pressure glows in helium

  POSTER

  Authors

  • Peng Zhang

  • Uwe Kortshagen

    • Department of Mechanical Engineering, University of Minnesota
    • University of Minnesota

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• On the mechanism of hollow-needle to plate atmospheric-pressure DC discharge

  POSTER

  Authors

  • Milan Simek

    • Institute of Plasma Physics, Laboratory of Pulse Plasma Systems, Prague, Czech Republic
    • Institute of Plasma Physics, Academy of Sciences of the Czech Republic, Za Slovankou 3, 18221 Prague 8, Czech Republic

  • Stanislav Pekarek

    • Czech Technical University, Faculty of Electrical Engineering, Technická 2, 166 27 Prague 6, Czech Republic

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• Experimental and computational study of gas temperature characteristics for atmospheric-pressure microgap discharge

  POSTER

  Authors

  • Akihiro Kono

  • Tomoyuki Shibata

  • Mitsutoshi Aramaki

    • Nagoya University

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• Time-Resolved Studies of Fast-Pulsed Dielectric Barrier Discharges

  POSTER

  Authors

  • Jose Lopez

    • Stevens Institute of Technology, Hoboken, NJ, USA

  • Robert J. Leiweke

    • US Air Force Research Laboratory, Propulsion Directorate, WPAFB, OH, USA

  • Peter Bletzinger

  • James M. Williamson

    • Innovative Scientific Solutions, Inc.
    • Innovative Scientific Solutions, Inc., Dayton, OH, USA

  • Abe Belkind

    • Stevens Institute of Technology
    • Stevens Institute of Technology, Hoboken, NJ, USA

  • Kurt H. Becker

    • Stevens Institute of Technology
    • Center for Environmental Systems, SIT
    • Center for Environmental Systems, SIT, Hoboken, NJ, USA
    • Stevens Institute of Technology and Center for Environmental Systems

  • Biswa N. Ganguly

    • US Air Force Research Laboratory, Propulsion Directorate, WPAFB
    • US Air Force Research Laboratory, Propulsion Directorate, WPAFB, OH, USA

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• Electrical properties of TiO$_{2}$ in a dielectric barrier discharge

  POSTER

  Authors

  • Olivier Guaitella

  • Antoine Rousseau

    • LPTP - Ecole Polytechnique - Palaiseau France

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• Microdischarge-assisted ignition of large volume dielectric barrier atmospheric pressure glow (DB-APG) discharge

  POSTER

  Authors

  • Jichul Shin

  • Laxminarayan Raja

    • University of Texas at Austin

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• Secondary ionization coefficient and electron reflection coefficient of MgO electrode

  POSTER

  Authors

  • Susumu Suzuki

  • Haruo Itoh

    • Chiba Institute of Technology

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• Observation of N$_{4}^{+}$ recombination at near atmospheric pressure

  POSTER

  Authors

  • S.F. Adams

  • C.A. DeJoseph, Jr.

    • Air Force Research Laboratory, Wright-Patterson AFB, OH 45433
    • Air Force Research Laboratory, Wright-Patterson AFB, OH

  • J.M. Williamson

    • Innovative Scientific Solutions, Inc., Dayton, OH

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• Control of ionic species composition in complex plasmas dominated by charge exchange collisions

  POSTER

  Authors

  • Kostya Ostrikov

    • School of Physics, The University of Sydney, Australia

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• Kinetic Modeling of Electric Discharge in a Preformed Air-Plasma Channel

  ORAL

  Authors

  • Tzvetelina Petrova

    • Naval Research Laboratory

  • Harold Ladouceur

    • Naval Research Laboratory

  • Andrew Baronavski

    • Naval Research Laboratory

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• LIGHTNING PLASMAS

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• Basic Study of Discharge Simulation with Relaxation Process of Electron Swarm for Plasma Display Panel

  POSTER

  Authors

  • Yukio Murakami

    • NHK Sci. Tech. Res. Labs.

  • Keiichi Kondo

    • Gaseous Electronics Inst.

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• Near IR Continuum Radiation From Metal Halide HID Lamps

  POSTER

  Authors

  • J.E. Lawler

  • M.T. Herd

    • University of Wisconsin

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• Development of a compact arc discharge light source for measurement of radicals

  POSTER

  Authors

  • Haruhiko Ito

    • Nagoya Municipal Industrial Research Institute

  • Seigo Takashima

    • Dept. of Electrical Engineering and Computer Science, Nagoya Univ.
    • Nagoya Univ.

  • Hiroyuki Kano

    • NU Eco-Engineering

  • Masaru Hori

    • Dept. of Electrical Engineering and Computer Science, Nagoya Univ.
    • Graduate School of Eng., Nagoya Univ.
    • Nagoya Univ.

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• COMPUTATIONAL METHODS FOR PLASMAS

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• Convergence of particle-in-cell simulations

  POSTER

  Authors

  • Miles M. Turner

    • Dublin City University, Ireland

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• Spectroscopic characterization of an ultrashort laser driven Ar cluster target incorporating both Boltzmann and particle-in-cell models

  POSTER

  Authors

  • Manolo Sherrill

  • J. Abdallah

  • G. Csanak

    • Theoretical Division Los Alamos National Laboratory

  • E. Dodd

    • Applied Physics Division, Los Alamos National Laboratory

  • Y. Fukuda

    • Advanced Photon Research Center, Japan Energy Research Institute

  • Y. Faenov

    • Multicharged Ions Spectra Data Center of VNIIFTRI

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• PLASMA AND NANOSTRUCTURAL MATERIALS

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• Nanofabrication of single-crystalline flat panel display microemitter arrays: a ``plasma-building unit'' approach

  POSTER

  Authors

  • Kostya Ostrikov

    • School of Physics, The University of Sydney, Australia

  • Shuyan Xu

    • Plasma Sources and Applications Center, NIE, NTU, Singapore

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• Simulation of ion deposition in nanofabrication of single-crystalline carbon nanotip electron field emitters

  POSTER

  Authors

  • Igor Levchenko

  • Kostya Ostrikov

    • School of Physics, The University of Sydney, Australia

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