Electronegative Plasmas

Presentations

• Charged species' densities and fluxes in a dual-frequency capacitive plasma

  ORAL

  Oct. 17, 2005, 1:00 PM – Oct. 17, 2005, 1:15 PM

  Authors

  • Garrett Curley

  • Jean-Paul Booth

    • LPTP, Ecole Polytechnique, 91128 Palaiseau, France

  • Cormac Corr

  • Jean Guillon

  • Sebastien Dine

    • LPTP, Ecole Polytechnique, 91128 Palaiseau, France

  View abstract →

• Ion Transport in Ion-Ion Plasmas

  ORAL

  Oct. 17, 2005, 1:15 PM – Oct. 17, 2005, 1:30 PM

  Authors

  • M. Lampe

  • R.F. Fernsler

  • S.P. Slinker

  • S.G. Walton

    • Naval Research Laboratory

  • D. Leonhardt

    • Plasma Physics Div., Naval Research Lab

  • G. Joyce

    • George Mason University

  View abstract →

• Electron and Ion Processes in Weak Plasmas

  ORAL

  Oct. 17, 2005, 1:30 PM – Oct. 17, 2005, 1:45 PM

  Authors

  • Thomas M. Miller

    • Air Force Research Laboratory

  • Jane M. Van Doren

    • College of the Holy Cross

  • A.A. Viggiano

    • Air Force Research Laboratory

  View abstract →

• Shading effect of electrons and positive ions in charging free plasma etching; In-situ measurement of temporal change of a contact hole charging in a pulsed two frequency CCP.

  ORAL

  Oct. 17, 2005, 1:45 PM – Oct. 17, 2005, 2:00 PM

  Authors

  • Takeshi Ohmori

  • Takumi Akaike

    • Keio University

  • Takeshi K. Goto

    • Keio University

  • Takeshi Kitajima

    • National Defense Academy
    • NDA, Keio University

  • Toshiaki Makabe

    • Keio University

  View abstract →

• Double Layers in the expanding region of electronegative plasmas

  COFFEE_KLATCH · Invited

  Oct. 17, 2005, 2:00 PM – Oct. 17, 2005, 2:30 PM

  Authors

  • Pascal Chabert

    • Ecole Polytechnique

  View abstract →