Plasma Chemistry and Plasma-Surface Interactions

Presentations

• Plasma-surface interaction: in situ and real time studies during plasma processing of materials

  COFFEE_KLATCH · Invited

  Oct. 17, 2005, 10:30 AM – Oct. 17, 2005, 11:00 AM

  Authors

  • Richard van de Sanden

    • Dept. Applied Physics, Eindhoven University of Technology

  View abstract →

• FTIR characterization of the gas phase chemistry in pulsed 1,3-butadiene discharges in a Gaseous Electronics Conference (GEC) Cell

  ORAL

  Oct. 17, 2005, 11:00 AM – Oct. 17, 2005, 11:15 AM

  Authors

  • Ashish Jindal

  • Lawrence Overzet

    • University of Texas at Dallas

  • Matthew Goeckner

    • University of Texas at Dallas
    • The University of Texas at Dallas

  View abstract →

• Influence of chamber scaling on different level polymerizing processing gases

  ORAL

  Oct. 17, 2005, 11:15 AM – Oct. 17, 2005, 11:30 AM

  Authors

  • Sanket Sant

  • Eric Joseph

  • Baosuo Zhou

  • Lawrence Overzet

    • University of Texas at Dallas

  • Matthew Goeckner

    • University of Texas at Dallas
    • The University of Texas at Dallas

  View abstract →

• O-atom Recombination on Anodized Aluminum in an Oxygen Plasma, Studied by a New ``Spinning Wall'' Technique.

  ORAL

  Oct. 17, 2005, 11:30 AM – Oct. 17, 2005, 11:45 AM

  Authors

  • Vincent M. Donnelly

  • Peter Kurunczi

  • Joydeep Guha

    • University of Houston

  View abstract →

• Hyper-Thermal Hydrogen Atoms Produced by Surface Neutralisation

  ORAL

  Oct. 17, 2005, 11:45 AM – Oct. 17, 2005, 12:00 PM

  Authors

  • Timo Gans

  • Tatiana Babkina

  • Uwe Czarnetzki

    • Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany

  View abstract →

• Oxygen Plasma Ion Implantation in MgF2 Anti-Reflection Coatings

  ORAL

  Oct. 17, 2005, 12:00 PM – Oct. 17, 2005, 12:15 PM

  Authors

  • M. Tuszewski

  • K. Scarborough

    • Los Alamos National Laboratory

  View abstract →