Single and pair-wise manipulation of atoms in a 3D optical lattice

We describe the hardware used in a quantum computing experiment using individual Cs atoms in a $5\,\mu\mathrm{m}$-spaced 3D optical lattice as qubits. Far-off-resonance addressing beams can be steered to any site in the array using MEMS mirrors within $10\,\mu\mathrm{s}$, allowing the translation of individual atoms between lattice sites, for example to remove vacancies in the atom array, and the manipulation of single atoms for single qubit gates in $<100\,\mu\mathrm{s}$. Two-qubit gates on adjacent atoms can be performed via the Rydberg blockade mechanism using a second MEMS system and high-NA imaging objective. The lasers for the Rydberg excitation are built using a new extended cavity diode laser design utilizing an interference filter as the frequency selecting element following Baillard, et al. (\emph{Opt. Comm.} 266: 609 (2009)), but using commercially available components.