GEC Session: Nanoplasmas

Presentations

• Experimental investigations of reactions in plasma etching of nanometer size structures

  COFFEE_KLATCH · Invited

  June 6, 2007, 11:30 AM – June 6, 2007, 12:06 PM

  Authors

  • Vincent Donnelly

    • University of Houston

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• Plasma-particle interactions and their role in nanocyrstal formation in plasmas

  COFFEE_KLATCH · Invited

  June 6, 2007, 12:06 PM – June 6, 2007, 12:42 PM

  Authors

  • Uwe Kortshagen

    • University of Minnesota

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• Plasma Etching of Nano-Scale Features

  COFFEE_KLATCH · Invited

  June 6, 2007, 12:42 PM – June 6, 2007, 1:18 PM

  Authors

  • Ying Zhang

    • IBM T. J. Watson Research Center, Yorktown Heights, NY 10598, USA

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• Nanoscale Challenges in Plasma-Surface Interactions

  COFFEE_KLATCH · Invited

  June 6, 2007, 1:18 PM – June 6, 2007, 1:54 PM

  Authors

  • David Graves

    • University of California at Berkeley

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