Electron Driven Processes and Their Applications

Presentations

• Fundamental Data for Semiconductor Manufacturing Unit Process Modeling and Simulation: Generation, Application and Current Needs

  COFFEE_KLATCH · Invited

  May 19, 2005, 12:30 PM – May 19, 2005, 1:06 PM

  Authors

  • Peter Ventzek

    • Freescale Semiconductor Inc.

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• New Opportunities in Plasma Production of Radicals and Ions for Treatment of Surfaces

  COFFEE_KLATCH · Invited

  May 19, 2005, 1:06 PM – May 19, 2005, 1:42 PM

  Authors

  • Mark J. Kushner

    • Iowa State University

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• The Polyatomic Dynamics of Electron-Driven Chemistry

  COFFEE_KLATCH · Invited

  May 19, 2005, 1:42 PM – May 19, 2005, 2:18 PM

  Authors

  • C. William McCurdy

    • University of California, Davis and Lawrence Berkeley National Laboratory
    • Lawrence Berkely National Lab and the University of California-Berkeley and the University of California-Davis

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• Elucidating the underlying role of electron-driven processes in atmospheric phenomena

  COFFEE_KLATCH · Invited

  May 19, 2005, 2:18 PM – May 19, 2005, 2:54 PM

  Authors

  • Michael Brunger

    • SoCPES, Flinders University, GPO Box 2100, Adelaide, SA 5001 Australia

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